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@article{485221, author = {Klapetek, Petr and Ohlídal, Ivan}, article_location = {Amsterdam}, article_number = {1}, keywords = {columnar films; atomic force microscopy}, language = {eng}, issn = {0304-3991}, journal = {Ultramicroscopy}, title = {Theoretical analysis of the atomic force microscopy characterization of columnar thin films}, volume = {94}, year = {2003} }
TY - JOUR ID - 485221 AU - Klapetek, Petr - Ohlídal, Ivan PY - 2003 TI - Theoretical analysis of the atomic force microscopy characterization of columnar thin films JF - Ultramicroscopy VL - 94 IS - 1 SP - 19-29 EP - 19-29 PB - Elsevier SN - 03043991 KW - columnar films KW - atomic force microscopy N2 - In this paper a theoretical analysis of atomic force microscopy measurements of columnar thin films is presented. Errors originating from tip convoution effects are evaluated. ER -
KLAPETEK, Petr and Ivan OHLÍDAL. Theoretical analysis of the atomic force microscopy characterization of columnar thin films. \textit{Ultramicroscopy}. Amsterdam: Elsevier, 2003, vol.~94, No~1, p.~19-29. ISSN~0304-3991.
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