KLAPETEK, Petr and Ivan OHLÍDAL. Theoretical analysis of the atomic force microscopy characterization of columnar thin films. Ultramicroscopy. Amsterdam: Elsevier, 2003, vol. 94, No 1, p. 19-29. ISSN 0304-3991.
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Basic information
Original name Theoretical analysis of the atomic force microscopy characterization of columnar thin films
Authors KLAPETEK, Petr (203 Czech Republic) and Ivan OHLÍDAL (203 Czech Republic, guarantor).
Edition Ultramicroscopy, Amsterdam, Elsevier, 2003, 0304-3991.
Other information
Original language English
Type of outcome Article in a journal
Field of Study 10302 Condensed matter physics
Country of publisher Netherlands
Confidentiality degree is not subject to a state or trade secret
Impact factor Impact factor: 1.665
RIV identification code RIV/00216224:14310/03:00007965
Organization unit Faculty of Science
UT WoS 000179626500002
Keywords in English columnar films; atomic force microscopy
Tags atomic force microscopy, columnar films
Changed by Changed by: Mgr. Petr Klapetek, Ph.D., učo 11111. Changed: 30/9/2003 08:53.
Abstract
In this paper a theoretical analysis of atomic force microscopy measurements of columnar thin films is presented. Errors originating from tip convoution effects are evaluated.
Links
GA101/01/1104, research and development projectName: Realizace laboratorního vzoru zařízení pro měření drsnosti povrchu metodou holografické interferometrie
Investor: Czech Science Foundation, Realisation of thelaboratory instrument for surface roughness measurement by holographic interferometry
GA202/01/1110, research and development projectName: Optické a mechanické vlastnosti tenkých vrstev DLC:Si připravených PECVD metodou
Investor: Czech Science Foundation, Optical and mechanical properties of DLC : Si thin films prepared by the PECVD method
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