Theoretical analysis of the atomic force microscopy characterization of columnar thin films

KLAPETEK, Petr and Ivan OHLÍDAL. Theoretical analysis of the atomic force microscopy characterization of columnar thin films. Ultramicroscopy. Amsterdam: Elsevier, 2003, vol. 94, No 1, p. 19-29. ISSN 0304-3991.

Basic information

Original name

Theoretical analysis of the atomic force microscopy characterization of columnar thin films

Authors

KLAPETEK, Petr (203 Czech Republic) and Ivan OHLÍDAL (203 Czech Republic, guarantor)

Edition

Ultramicroscopy, Amsterdam, Elsevier, 2003, 0304-3991

---

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10302 Condensed matter physics

Country of publisher

Netherlands

Confidentiality degree

není předmětem státního či obchodního tajemství

Impact factor

Impact factor: 1.665

RIV identification code

RIV/00216224:14310/03:00007965

Organization unit

Faculty of Science

UT WoS

000179626500002

Keywords in English

columnar films; atomic force microscopy

Tags

atomic force microscopy, columnar films

---

Abstract

V originále

In this paper a theoretical analysis of atomic force microscopy measurements of columnar thin films is presented. Errors originating from tip convoution effects are evaluated.

---

Links

GA101/01/1104, research and development project	Name: Realizace laboratorního vzoru zařízení pro měření drsnosti povrchu metodou holografické interferometrie Investor: Czech Science Foundation, Realisation of thelaboratory instrument for surface roughness measurement by holographic interferometry
GA202/01/1110, research and development project	Name: Optické a mechanické vlastnosti tenkých vrstev DLC:Si připravených PECVD metodou Investor: Czech Science Foundation, Optical and mechanical properties of DLC : Si thin films prepared by the PECVD method