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@inproceedings{486200,
author = {Doležal, Vojtěch and Zajíčková, Lenka and Janča, Jan and Dvořák, Pavel},
address = {Praha},
booktitle = {WDS`01 Proceeding of contributed papers, part 2},
keywords = {rf plasma; actinometry; spetrometer calibration},
language = {eng},
location = {Praha},
isbn = {80-85863-71-1},
pages = {394-399},
publisher = {Matfyzpress},
title = {Optical Diagnostic of RF Plasma: Spectrometer Calibration and Actinometry},
year = {2001}
}
TY - JOUR
ID - 486200
AU - Doležal, Vojtěch - Zajíčková, Lenka - Janča, Jan - Dvořák, Pavel
PY - 2001
TI - Optical Diagnostic of RF Plasma: Spectrometer Calibration and Actinometry
PB - Matfyzpress
CY - Praha
SN - 8085863711
KW - rf plasma
KW - actinometry
KW - spetrometer calibration
N2 - In low pressure capacitively coupled rf oxygen discharge we use actinometry method to monitor the oxygen atom concentration. As actinometer we used small impurity of argon, oxygen-to-argon flow rate ratio 19:1. We measure actinometric signal, ie., atomic oxygen-to-argon line intensity, at a pressure 32.2 Pa and 100-400~W rf power range. An rf power increases the actinometric signal rises, which corresponds to the increase of the atomic oxygen concetration. To obtain real actinometric signal we needed to know the spectral response of the monochromator used (Triax 320 Jobin-Yvon with holographic difraction grating and CCD chip). Therefore the calibration of the spectrometer with the grey body radiation of tungsten standart (bulb with W strip) was performed.
ER -
DOLEŽAL, Vojtěch, Lenka ZAJÍČKOVÁ, Jan JANČA and Pavel DVOŘÁK. Optical Diagnostic of RF Plasma: Spectrometer Calibration and Actinometry. In \textit{WDS`01 Proceeding of contributed papers, part 2}. Praha: Matfyzpress, 2001, p.~394-399. ISBN~80-85863-71-1.
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