| ZAJÍČKOVÁ, Lenka, Siegmar RUDAKOWSKI, Hans-Werner BECKER, Dirk MEYER, Miroslav VALTR and Klaus WIESEMANN. Study of Plasma Polymerization from Acetylene in Pulsed RF Discharges. Thin Solid Films. Oxford: Elsevier, 2003, vol. 2003, No 425, p. 72-84. ISSN 0040-6090. |
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@article{487192,
author = {Zajíčková, Lenka and Rudakowski, Siegmar and Becker, HansandWerner and Meyer, Dirk and Valtr, Miroslav and Wiesemann, Klaus},
article_location = {Oxford},
article_number = {425},
keywords = {Acetylene; Plasma Enhanced CVD (PECVD); Optical properties; Atomic force microscopy},
language = {eng},
issn = {0040-6090},
journal = {Thin Solid Films},
title = {Study of Plasma Polymerization from Acetylene in Pulsed RF Discharges},
volume = {2003},
year = {2003}
}
TY - JOUR
ID - 487192
AU - Zajíčková, Lenka - Rudakowski, Siegmar - Becker, Hans-Werner - Meyer, Dirk - Valtr, Miroslav - Wiesemann, Klaus
PY - 2003
TI - Study of Plasma Polymerization from Acetylene in Pulsed RF Discharges
JF - Thin Solid Films
VL - 2003
IS - 425
SP - 72-84
EP - 72-84
PB - Elsevier
SN - 00406090
KW - Acetylene
KW - Plasma Enhanced CVD (PECVD)
KW - Optical properties
KW - Atomic force microscopy
N2 - Plasma polymer films were deposited from an argon and acetylene mixture by plasma enhanced chemical vapor deposition in pulsed radio frequency discharges. The discharge on-time varied from 50 to 150 ms and the off-time was kept constant at 1900 ms. The kinetics of the film growth was studied by in-situ reflectance measurements. The films were further investigated ex-situ by spectroscopic ellipsometry, %in the ultraviolet and the visible (UV/VIS) atomic force microscopy, scanning and transmission electron microscopes. Damages in the films caused by residual stress were investigated with an optical microscope. The hydrogen content and film densities were measured by nuclear resonance reaction analyses. Some film properties namely the residual stress, deposition rate, optical properties and surface roughness were significantly influenced by the duration of the discharge pulses. We found refractive indices of the films in the visible in the range 1.60-1.73. The hydrogen-to-carbon ratio in the films and the film density were about 3:2 and 0.6 g/cm3, respectively.
ER -
ZAJÍČKOVÁ, Lenka, Siegmar RUDAKOWSKI, Hans-Werner BECKER, Dirk MEYER, Miroslav VALTR and Klaus WIESEMANN. Study of Plasma Polymerization from Acetylene in Pulsed RF Discharges. \textit{Thin Solid Films}. Oxford: Elsevier, 2003, vol.~2003, No~425, p.~72-84. ISSN~0040-6090.
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