Optical properties of diamond-like carbon films containing SiOx

J 2003

Optical properties of diamond-like carbon films containing SiOx

FRANTA, Daniel, Ivan OHLÍDAL, Vilma BURŠÍKOVÁ and Lenka ZAJÍČKOVÁ

Basic information

Original name

Optical properties of diamond-like carbon films containing SiOx

Authors

FRANTA, Daniel (203 Czech Republic, guarantor), Ivan OHLÍDAL (203 Czech Republic), Vilma BURŠÍKOVÁ (203 Czech Republic) and Lenka ZAJÍČKOVÁ (203 Czech Republic)

Edition

Diamond and Related Materials, Amsterdam, Elsevier, 2003, 0925-9635

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10302 Condensed matter physics

Country of publisher

Netherlands

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Impact factor

Impact factor: 1.867

RIV identification code

RIV/00216224:14310/03:00008251

Organization unit

Faculty of Science

UT WoS

000185308900015

Keywords in English

Ellipsometry; Density of States; Diamond-like carbon; Silicon

Abstract

V originále

In this paper the optical properties of amorphous DLC films containing SiOx (DLC:SiOx) prepared by plasma enhanced chemical vapour deposition are studied. For this study a combined optical method based on simultaneous interpretation of experimental data obtained within variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry is used. The interpretation of these combined experimental data is performed using a new empirical dispersion model of the optical constants characterizing the films under investigation. This dispersion model is based on parameterizing the density of the electronic states belonging to both the valence and conduction bands. It is shown that there are the strong differences between spectral dependences of the optical constants of the DLC films on the one hand and DLC:SiOx films on the other hand. Further, it is shown that the absorption of the DLC:SiOx films is smaller than the absorption of the pure DLC films in the visible. This is explained by the fact that the density of the pi electrons inside the DLC:SiOx films is lower than the density of these electrons in the pure DLC films. It is also found that the existence of small amounts of the silicon and oxygen impurities contained in the DLC films strongly influence their optical properties.

Links

GA202/01/1110, research and development project

Name: Optické a mechanické vlastnosti tenkých vrstev DLC:Si připravených PECVD metodou

Investor: Czech Science Foundation, Optical and mechanical properties of DLC : Si thin films prepared by the PECVD method

Citovat

FRANTA, Daniel, Ivan OHLÍDAL, Vilma BURŠÍKOVÁ and Lenka ZAJÍČKOVÁ. Optical properties of diamond-like carbon films containing SiOx. Diamond and Related Materials. Amsterdam: Elsevier, 2003, vol. 12, No 9, p. 1532-1538. ISSN 0925-9635.

@article{489708,
   author = {Franta, Daniel and Ohlídal, Ivan and Buršíková, Vilma and Zajíčková, Lenka},
   article_location = {Amsterdam},
   article_number = {9},
   keywords = {Ellipsometry; Density of States; Diamond-like carbon; Silicon},
   language = {eng},
   issn = {0925-9635},
   journal = {Diamond and Related Materials},
   title = {Optical properties of diamond-like carbon films containing SiOx},
   url = {http://hydra.physics.muni.cz/~franta/bib/DRM12_1532.html},
   volume = {12},
   year = {2003}
}

TY  - JOUR
ID  - 489708
AU  - Franta, Daniel - Ohlídal, Ivan - Buršíková, Vilma - Zajíčková, Lenka
PY  - 2003
TI  - Optical properties of diamond-like carbon films containing SiOx
JF  - Diamond and Related Materials
VL  - 12
IS  - 9
SP  - 1532-1538
EP  - 1532-1538
PB  - Elsevier
SN  - 09259635
KW  - Ellipsometry
KW  - Density of States
KW  - Diamond-like carbon
KW  - Silicon
UR  - http://hydra.physics.muni.cz/~franta/bib/DRM12_1532.html
N2  - In this paper the optical properties of amorphous DLC films containing SiOx (DLC:SiOx) prepared by plasma enhanced chemical vapour deposition are studied. For this study a combined optical method based on simultaneous interpretation of experimental data obtained within variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry is used. The interpretation of these combined experimental data is performed using a new empirical dispersion model of the optical constants characterizing the films under investigation. This dispersion model is based on parameterizing the density of the electronic states belonging to both the valence and conduction bands. It is shown that there are the strong differences between spectral dependences of the optical constants of the DLC films on the one hand and DLC:SiOx films on the other hand. Further, it is shown that the absorption of the DLC:SiOx films is smaller than the absorption of the pure DLC films in the visible. This is explained by the fact that the density of the pi electrons inside the DLC:SiOx films is lower than the density of these electrons in the pure DLC films. It is also found that the existence of small amounts of the silicon and oxygen impurities contained in the DLC films strongly influence their optical properties.
ER  -

FRANTA, Daniel, Ivan OHLÍDAL, Vilma BURŠÍKOVÁ and Lenka ZAJÍČKOVÁ. Optical properties of diamond-like carbon films containing SiOx. \textit{Diamond and Related Materials}. Amsterdam: Elsevier, 2003, vol.~12, No~9, p.~1532-1538. ISSN~0925-9635.

Detailed Information on Publication Record