Optical properties of diamond-like carbon films containing SiOx

FRANTA, Daniel, Ivan OHLÍDAL, Vilma BURŠÍKOVÁ and Lenka ZAJÍČKOVÁ. Optical properties of diamond-like carbon films containing SiOx. Diamond and Related Materials. Amsterdam: Elsevier, 2003, vol. 12, No 9, p. 1532-1538. ISSN 0925-9635.

Basic information

• Original name: Optical properties of diamond-like carbon films containing SiOx
• Authors: FRANTA, Daniel (203 Czech Republic, guarantor), Ivan OHLÍDAL (203 Czech Republic), Vilma BURŠÍKOVÁ (203 Czech Republic) and Lenka ZAJÍČKOVÁ (203 Czech Republic).
• Edition: Diamond and Related Materials, Amsterdam, Elsevier, 2003, 0925-9635.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10302 Condensed matter physics
• Country of publisher: Netherlands
• Confidentiality degree: is not subject to a state or trade secret
• WWW: URL
• Impact factor: Impact factor: 1.867
• RIV identification code: RIV/00216224:14310/03:00008251
• Organization unit: Faculty of Science
• UT WoS: 000185308900015
• Keywords in English: Ellipsometry; Density of States; Diamond-like carbon; Silicon
• Tags: Density of States, Diamond-like Carbon, ellipsometry, Silicon
• Tags: International impact, Reviewed

Abstract

In this paper the optical properties of amorphous DLC films containing SiOx (DLC:SiOx) prepared by plasma enhanced chemical vapour deposition are studied. For this study a combined optical method based on simultaneous interpretation of experimental data obtained within variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry is used. The interpretation of these combined experimental data is performed using a new empirical dispersion model of the optical constants characterizing the films under investigation. This dispersion model is based on parameterizing the density of the electronic states belonging to both the valence and conduction bands. It is shown that there are the strong differences between spectral dependences of the optical constants of the DLC films on the one hand and DLC:SiOx films on the other hand. Further, it is shown that the absorption of the DLC:SiOx films is smaller than the absorption of the pure DLC films in the visible. This is explained by the fact that the density of the pi electrons inside the DLC:SiOx films is lower than the density of these electrons in the pure DLC films. It is also found that the existence of small amounts of the silicon and oxygen impurities contained in the DLC films strongly influence their optical properties.

Links

• GA202/01/1110, research and development project: Name: Optické a mechanické vlastnosti tenkých vrstev DLC:Si připravených PECVD metodou

Investor: Czech Science Foundation, Optical and mechanical properties of DLC : Si thin films prepared by the PECVD method