J 2003

New Dispersion Model of the Optical Constants of the DLC Films

FRANTA, Daniel, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ and Ivan OHLÍDAL

Basic information

Original name

New Dispersion Model of the Optical Constants of the DLC Films

Authors

FRANTA, Daniel (203 Czech Republic, guarantor), Lenka ZAJÍČKOVÁ (203 Czech Republic), Vilma BURŠÍKOVÁ (203 Czech Republic) and Ivan OHLÍDAL (203 Czech Republic)

Edition

Acta Physica Slovaca, Bratislava, Institute of Physics, SAS, 2003, 0323-0465

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10302 Condensed matter physics

Country of publisher

Slovakia

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

Impact factor

Impact factor: 0.579

RIV identification code

RIV/00216224:14310/03:00008252

Organization unit

Faculty of Science

UT WoS

000186031700003

Keywords in English

Diamond-like Carbon; Ellipsometry; Dispersion Model

Tags

Změněno: 28/11/2004 18:18, Mgr. Daniel Franta, Ph.D.

Abstract

V originále

In this paper a new dispersion model of the optical constants of amorphous solids enabled us to perform an efficient parameterization of the optical constants of diamond like carbon (DLC) thin films. The model was based on the mathematical modeling of the density of electronic states (DOS) corresponding to both the valence and conduction bands. Moreover, the existence of the sigma and pi electronic states was taken into account, i.e. two valence and two conduction bands were supposed. The imaginary and real parts of the dielectric function were then calculated by the numerical convolution of the DOS and using a corresponding Kramers-Kronig relation, respectively. According to the model the DOS as well as the optical constants were calculated from ellipsometric measurements in the range 240-830 nm and estimated even outside this range. From the parameters of the model we evaluated also the ratio of pi-to-sigma electrons and consequently the sp3-to-sp2 ratio using a known hydrogen atomic fraction. The optical constants of DLC films with addition of SiOx were determined and compared with DLC too.

Links

GA202/01/1110, research and development project
Name: Optické a mechanické vlastnosti tenkých vrstev DLC:Si připravených PECVD metodou
Investor: Czech Science Foundation, Optical and mechanical properties of DLC : Si thin films prepared by the PECVD method
ME 489, research and development project
Name: Studium reaktivity organosilikonových monomerů v depozičním plazmatu
MSM 143100003, plan (intention)
Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates