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@inproceedings{491338,
author = {Franta, Daniel and Ohlídal, Ivan and Klapetek, Petr and MontaigneandRamil, Alberto and Bonanni, Alberta and Stifter, David and Sitter, Helmut},
address = {Bellingham, Washington, USA},
booktitle = {19th Congress of the International Commission for Optics: Optics for the Quality of Life},
keywords = {ZnSe; Optical constants; Ellipsometry},
language = {eng},
location = {Bellingham, Washington, USA},
isbn = {0-8194-4596-7},
pages = {831-832},
publisher = {SPIE - The International Society for Optical Engineering},
title = {Optical characterization of ZnSe thin films},
url = {http://hydra.physics.muni.cz/~franta/bib/SPIE4829_831.html},
year = {2003}
}
TY - JOUR
ID - 491338
AU - Franta, Daniel - Ohlídal, Ivan - Klapetek, Petr - Montaigne-Ramil, Alberto - Bonanni, Alberta - Stifter, David - Sitter, Helmut
PY - 2003
TI - Optical characterization of ZnSe thin films
PB - SPIE - The International Society for Optical Engineering
CY - Bellingham, Washington, USA
SN - 0819445967
KW - ZnSe
KW - Optical constants
KW - Ellipsometry
UR - http://hydra.physics.muni.cz/~franta/bib/SPIE4829_831.html
N2 - In this paper the optical method based on multisample modification variable angle spectroscopic ellipsometry (VASE) is used to characterize thin films of ZnSe prepared by molecular beam epitaxy onto GaAs single crystal substrates. It is found that this method can be employed for determining the spectral dependences of the optical constants and values of the thicknesses of the films mentioned. Moreover, it is shown that using this method the RMS values of the heights and the values of the correlation length characterizing roughness irregularities of the upper boundaries of the films can be determined as well. The application of the method is illustrated by means of characterizing six samples of the ZnSe-films exhibiting different values of the thicknesses.
ER -
FRANTA, Daniel, Ivan OHLÍDAL, Petr KLAPETEK, Alberto MONTAIGNE-RAMIL, Alberta BONANNI, David STIFTER and Helmut SITTER. Optical characterization of ZnSe thin films. In \textit{19th Congress of the International Commission for Optics: Optics for the Quality of Life}. Bellingham, Washington, USA: SPIE - The International Society for Optical Engineering, 2003, p.~831-832. ISBN~0-8194-4596-7.
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