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@inproceedings{491545, author = {Franclová, Jana and Buršíková, Vilma}, address = {Brno}, booktitle = {Juniormat 2003}, edition = {1.}, keywords = {PECVD; HMDSO; Electrical conductivity}, language = {eng}, location = {Brno}, isbn = {80-214-2462-1}, pages = {266 - 267}, publisher = {Brno University of Technology, Faculty of Mechanical Engeneering}, title = {Electrical conductivity of Si incorporated diamond-like carbon films deposited by PECVD}, year = {2003} }
TY - JOUR ID - 491545 AU - Franclová, Jana - Buršíková, Vilma PY - 2003 TI - Electrical conductivity of Si incorporated diamond-like carbon films deposited by PECVD PB - Brno University of Technology, Faculty of Mechanical Engeneering CY - Brno SN - 8021424621 KW - PECVD KW - HMDSO KW - Electrical conductivity N2 - Electrical conductivity of Si incorporated diamond - like carbon films deposited by PECVD ER -
FRANCLOVÁ, Jana and Vilma BURŠÍKOVÁ. Electrical conductivity of Si incorporated diamond-like carbon films deposited by PECVD. In \textit{Juniormat 2003}. 1st ed. Brno: Brno University of Technology, Faculty of Mechanical Engeneering, 2003, p.~266 - 267. ISBN~80-214-2462-1.
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