Electrical conductivity of Si incorporated diamond-like carbon films deposited by PECVD

FRANCLOVÁ, Jana and Vilma BURŠÍKOVÁ. Electrical conductivity of Si incorporated diamond-like carbon films deposited by PECVD. In Juniormat 2003. 1st ed. Brno: Brno University of Technology, Faculty of Mechanical Engeneering, 2003, p. 266 - 267. ISBN 80-214-2462-1.

Basic information

Original name

Electrical conductivity of Si incorporated diamond-like carbon films deposited by PECVD

Name in Czech

Elektrická vodivost diamantupodobných vrstev připravených PECVD

Authors

FRANCLOVÁ, Jana (203 Czech Republic) and Vilma BURŠÍKOVÁ (203 Czech Republic, guarantor)

Edition

1. vyd. Brno, Juniormat 2003, p. 266 - 267, 2 pp. 2003

Publisher

Brno University of Technology, Faculty of Mechanical Engeneering

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Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Czech Republic

Confidentiality degree

není předmětem státního či obchodního tajemství

RIV identification code

RIV/00216224:14310/03:00021185

Organization unit

Faculty of Science

ISBN

80-214-2462-1

Keywords in English

PECVD; HMDSO; Electrical conductivity

Tags

Electrical Conductivity, HMDSO, PECVD

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Abstract

V originále

Electrical conductivity of Si incorporated diamond - like carbon films deposited by PECVD

In Czech

Elektrická vodivost tenkých vrstev připravených PECVD

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Links

ME 489, research and development project

Name: Studium reaktivity organosilikonových monomerů v depozičním plazmatu