FRANCLOVÁ, Jana and Vilma BURŠÍKOVÁ. Electrical conductivity of Si incorporated diamond-like carbon films deposited by PECVD. In Juniormat 2003. 1st ed. Brno: Brno University of Technology, Faculty of Mechanical Engeneering, 2003, p. 266 - 267. ISBN 80-214-2462-1.
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Basic information
Original name Electrical conductivity of Si incorporated diamond-like carbon films deposited by PECVD
Name in Czech Elektrická vodivost diamantupodobných vrstev připravených PECVD
Authors FRANCLOVÁ, Jana (203 Czech Republic) and Vilma BURŠÍKOVÁ (203 Czech Republic, guarantor).
Edition 1. vyd. Brno, Juniormat 2003, p. 266 - 267, 2 pp. 2003.
Publisher Brno University of Technology, Faculty of Mechanical Engeneering
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 10305 Fluids and plasma physics
Country of publisher Czech Republic
Confidentiality degree is not subject to a state or trade secret
RIV identification code RIV/00216224:14310/03:00021185
Organization unit Faculty of Science
ISBN 80-214-2462-1
Keywords in English PECVD; HMDSO; Electrical conductivity
Tags Electrical Conductivity, HMDSO, PECVD
Changed by Changed by: Mgr. Jana Meixnerová, Ph.D., učo 13309. Changed: 23/9/2005 19:46.
Abstract
Electrical conductivity of Si incorporated diamond - like carbon films deposited by PECVD
Abstract (in Czech)
Elektrická vodivost tenkých vrstev připravených PECVD
Links
ME 489, research and development projectName: Studium reaktivity organosilikonových monomerů v depozičním plazmatu
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