Study of reaction between HMDSO and O atoms in afterglow
KUDRLE, Vít, Vojtěch DOLEŽAL, Antonín TÁLSKÝ and Jan JANČA. Study of reaction between HMDSO and O atoms in afterglow. In Proceedings of ISPC 14. Taormina: Universita di Bari. p. 463-466. 2003. |
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Basic information | |
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Original name | Study of reaction between HMDSO and O atoms in afterglow |
Name in Czech | Studium reakce mezi parami HMDSO a kyslíkových atomů v dohasínajícím plazmatu |
Authors | KUDRLE, Vít (203 Czech Republic, guarantor), Vojtěch DOLEŽAL (203 Czech Republic), Antonín TÁLSKÝ (203 Czech Republic) and Jan JANČA (203 Czech Republic). |
Edition | Taormina, Proceedings of ISPC 14, p. 463-466, 2003. |
Publisher | Universita di Bari |
Other information | |
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Original language | English |
Type of outcome | Proceedings paper |
Field of Study | 10305 Fluids and plasma physics |
Country of publisher | Italy |
Confidentiality degree | is not subject to a state or trade secret |
RIV identification code | RIV/00216224:14310/03:00008460 |
Organization unit | Faculty of Science |
Keywords in English | plasmachemical reaction; HMDSO; EPR |
Tags | EPR, HMDSO, plasmachemical reaction |
Tags | International impact |
Changed by | Changed by: prof. Mgr. Vít Kudrle, Ph.D., učo 2560. Changed: 6/6/2008 13:26. |
Abstract |
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In this work the kinetics of reactions between atomic oxygen and HMDSO was studied. Rate constant was measured by means of electron paramagnetic resonance spectroscopy. |
Abstract (in Czech) |
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V této práci je studována kinetika reakcí mezi atomárním kyslíkem a parami HMDSO. Pomocí spektroskopie electronové paramagnetické rezonance byla naměřena rychlostní konstanta. |
Links | |
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GP202/01/P106, research and development project | Name: Studium plazmochemických procesů pomocí mikrovlnné a optické spektroskopie |
Investor: Czech Science Foundation, Study of plasmachemical processes using microwave and optical spectroscopy | |
MSM 143100003, plan (intention) | Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek |
Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates | |
OC 527.20, research and development project | Name: Plazmochemické depozice a plazmochemické opracování povrchu pevných substrátů |
Investor: Ministry of Education, Youth and Sports of the CR, Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate |
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