KUDRLE, Vít, Vojtěch DOLEŽAL, Antonín TÁLSKÝ and Jan JANČA. Study of reaction between HMDSO and O atoms in afterglow. In Proceedings of ISPC 14. Taormina: Universita di Bari, 2003. p. 463-466.
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Basic information
Original name Study of reaction between HMDSO and O atoms in afterglow
Name in Czech Studium reakce mezi parami HMDSO a kyslíkových atomů v dohasínajícím plazmatu
Authors KUDRLE, Vít (203 Czech Republic, guarantor), Vojtěch DOLEŽAL (203 Czech Republic), Antonín TÁLSKÝ (203 Czech Republic) and Jan JANČA (203 Czech Republic).
Edition Taormina, Proceedings of ISPC 14, p. 463-466, 2003.
Publisher Universita di Bari
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 10305 Fluids and plasma physics
Country of publisher Italy
Confidentiality degree is not subject to a state or trade secret
RIV identification code RIV/00216224:14310/03:00008460
Organization unit Faculty of Science
Keywords in English plasmachemical reaction; HMDSO; EPR
Tags EPR, HMDSO, plasmachemical reaction
Tags International impact
Changed by Changed by: prof. Mgr. Vít Kudrle, Ph.D., učo 2560. Changed: 6. 6. 2008 13:26.
Abstract
In this work the kinetics of reactions between atomic oxygen and HMDSO was studied. Rate constant was measured by means of electron paramagnetic resonance spectroscopy.
Abstract (in Czech)
V této práci je studována kinetika reakcí mezi atomárním kyslíkem a parami HMDSO. Pomocí spektroskopie electronové paramagnetické rezonance byla naměřena rychlostní konstanta.
Links
GP202/01/P106, research and development projectName: Studium plazmochemických procesů pomocí mikrovlnné a optické spektroskopie
Investor: Czech Science Foundation, Study of plasmachemical processes using microwave and optical spectroscopy
MSM 143100003, plan (intention)Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates
OC 527.20, research and development projectName: Plazmochemické depozice a plazmochemické opracování povrchu pevných substrátů
Investor: Ministry of Education, Youth and Sports of the CR, Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate
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