FRGALA, Zdeněk, Vít KUDRLE, Jan JANČA, Vilma BURŠÍKOVÁ, Petr VAŠINA, Marcel MEŠKO, Jiří BURŠÍK, M. KADLEČÍKOVÁ and Petr KLAPETEK. Diamond Growth on silicon and WC-Co by microwave plasma chemical vapor deposition. In Proceedings of contributed papers WDS'03. Praha: MFF UK, 2003, p. 341-346.
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Basic information
Original name Diamond Growth on silicon and WC-Co by microwave plasma chemical vapor deposition
Authors FRGALA, Zdeněk (203 Czech Republic, guarantor), Vít KUDRLE (203 Czech Republic), Jan JANČA (203 Czech Republic), Vilma BURŠÍKOVÁ (203 Czech Republic), Petr VAŠINA (203 Czech Republic), Marcel MEŠKO (703 Slovakia), Jiří BURŠÍK (203 Czech Republic), M. KADLEČÍKOVÁ (203 Czech Republic) and Petr KLAPETEK (203 Czech Republic).
Edition Praha, Proceedings of contributed papers WDS'03, p. 341-346, 6 pp. 2003.
Publisher MFF UK
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 10305 Fluids and plasma physics
Country of publisher Czech Republic
Confidentiality degree is not subject to a state or trade secret
RIV identification code RIV/00216224:14330/03:00008619
Organization unit Faculty of Informatics
Keywords in English PECVD; diamond; WC; raman spectra; SEM
Tags Diamond, PECVD, Raman spectra, SEM, WC
Tags International impact
Changed by Changed by: prof. Mgr. Vít Kudrle, Ph.D., učo 2560. Changed: 6/6/2008 12:53.
Abstract
Diamond Growth on silicon and WC=Co by microwave plasma chemical vapor deposition
Links
GP202/01/P106, research and development projectName: Studium plazmochemických procesů pomocí mikrovlnné a optické spektroskopie
Investor: Czech Science Foundation, Study of plasmachemical processes using microwave and optical spectroscopy
IBS2041105, research and development projectName: Povrchy a rozhraní v konstrukčních materiálech - aplikace moderních technologií a počítačového modelování
MSM 143100003, plan (intention)Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates
OC 527.20, research and development projectName: Plazmochemické depozice a plazmochemické opracování povrchu pevných substrátů
Investor: Ministry of Education, Youth and Sports of the CR, Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate
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