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@inproceedings{492208,
author = {Kudrle, Vít and Zajíčková, Lenka and Wiesemann, Klaus},
address = {Taormina},
booktitle = {Proceedings of ISPC 14},
keywords = {plasma impedance},
language = {eng},
location = {Taormina},
pages = {462-465},
publisher = {Universita di Bari},
title = {Improved calibration procedure of an RF plasma impedance probe},
year = {2003}
}
TY - JOUR
ID - 492208
AU - Kudrle, Vít - Zajíčková, Lenka - Wiesemann, Klaus
PY - 2003
TI - Improved calibration procedure of an RF plasma impedance probe
PB - Universita di Bari
CY - Taormina
KW - plasma impedance
N2 - Improved calibartion procedure of an RF plasma impedance probe
ER -
KUDRLE, Vít, Lenka ZAJÍČKOVÁ a Klaus WIESEMANN. Improved calibration procedure of an RF plasma impedance probe. In \textit{Proceedings of ISPC 14}. Taormina: Universita di Bari, 2003. s.~462-465.
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