KUDRLE, Vít, Lenka ZAJÍČKOVÁ and Klaus WIESEMANN. Improved calibration procedure of an RF plasma impedance probe. In Proceedings of ISPC 14. Taormina: Universita di Bari, 2003. p. 462-465.
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Basic information
Original name Improved calibration procedure of an RF plasma impedance probe
Authors KUDRLE, Vít (203 Czech Republic, guarantor), Lenka ZAJÍČKOVÁ (203 Czech Republic) and Klaus WIESEMANN (276 Germany).
Edition Taormina, Proceedings of ISPC 14, p. 462-465, 2003.
Publisher Universita di Bari
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 10305 Fluids and plasma physics
Country of publisher Italy
Confidentiality degree is not subject to a state or trade secret
RIV identification code RIV/00216224:14310/03:00008475
Organization unit Faculty of Science
Keywords in English plasma impedance
Tags plasma impedance
Tags International impact
Changed by Changed by: prof. Mgr. Vít Kudrle, Ph.D., učo 2560. Changed: 5. 1. 2007 12:49.
Abstract
Improved calibartion procedure of an RF plasma impedance probe
Links
GP202/01/P106, research and development projectName: Studium plazmochemických procesů pomocí mikrovlnné a optické spektroskopie
Investor: Czech Science Foundation, Study of plasmachemical processes using microwave and optical spectroscopy
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