D 2003

Film deposition in Parallel Plate RF Discharges Containing Hydrocarbons

BIBINOV, Nikita, Vít KUDRLE, Lenka ZAJÍČKOVÁ, Zoltan DONKO, Klaus WIESEMANN et. al.

Basic information

Original name

Film deposition in Parallel Plate RF Discharges Containing Hydrocarbons

Authors

BIBINOV, Nikita (276 Germany), Vít KUDRLE (203 Czech Republic, guarantor), Lenka ZAJÍČKOVÁ (203 Czech Republic), Zoltan DONKO (348 Hungary) and Klaus WIESEMANN (276 Germany)

Edition

Taormina, Proceedings of ISPC 14, p. 806-809, 2003

Publisher

Universita di Bari

Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Italy

Confidentiality degree

není předmětem státního či obchodního tajemství

RIV identification code

RIV/00216224:14310/03:00008476

Organization unit

Faculty of Science

Keywords in English

PECVD; negative ions; acethylene

Tags

Tags

International impact
Změněno: 25/6/2007 16:53, prof. Mgr. Vít Kudrle, Ph.D.

Abstract

V originále

Film deposition in Paralle Plate RF Discharges Containing Hydrocarbons

Links

GP202/01/P106, research and development project
Name: Studium plazmochemických procesů pomocí mikrovlnné a optické spektroskopie
Investor: Czech Science Foundation, Study of plasmachemical processes using microwave and optical spectroscopy
MSM 143100003, plan (intention)
Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates