BIBINOV, Nikita, Vít KUDRLE, Lenka ZAJÍČKOVÁ, Zoltan DONKO and Klaus WIESEMANN. Film deposition in Parallel Plate RF Discharges Containing Hydrocarbons. In Proceedings of ISPC 14. Taormina: Universita di Bari, 2003, p. 806-809.
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Basic information
Original name Film deposition in Parallel Plate RF Discharges Containing Hydrocarbons
Authors BIBINOV, Nikita (276 Germany), Vít KUDRLE (203 Czech Republic, guarantor), Lenka ZAJÍČKOVÁ (203 Czech Republic), Zoltan DONKO (348 Hungary) and Klaus WIESEMANN (276 Germany).
Edition Taormina, Proceedings of ISPC 14, p. 806-809, 2003.
Publisher Universita di Bari
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 10305 Fluids and plasma physics
Country of publisher Italy
Confidentiality degree is not subject to a state or trade secret
RIV identification code RIV/00216224:14310/03:00008476
Organization unit Faculty of Science
Keywords in English PECVD; negative ions; acethylene
Tags acethylene, negative ions, PECVD
Tags International impact
Changed by Changed by: prof. Mgr. Vít Kudrle, Ph.D., učo 2560. Changed: 25/6/2007 16:53.
Abstract
Film deposition in Paralle Plate RF Discharges Containing Hydrocarbons
Links
GP202/01/P106, research and development projectName: Studium plazmochemických procesů pomocí mikrovlnné a optické spektroskopie
Investor: Czech Science Foundation, Study of plasmachemical processes using microwave and optical spectroscopy
MSM 143100003, plan (intention)Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates
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