Deposition of Hard carbon films and Its Diagnostics
| FRGALA, Zdeněk, Vít KUDRLE and Jan JANČA. Deposition of Hard carbon films and Its Diagnostics. In Proceedings of the XIVth SAPP. Bratislava: MFF UK, 2003, p. 154-155. ISBN 80-8040-195-0. |
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| Basic information | |
|---|---|
| Original name | Deposition of Hard carbon films and Its Diagnostics |
| Authors | FRGALA, Zdeněk (203 Czech Republic, guarantor), Vít KUDRLE (203 Czech Republic) and Jan JANČA (203 Czech Republic). |
| Edition | Bratislava, Proceedings of the XIVth SAPP, p. 154-155, 2003. |
| Publisher | MFF UK |
| Other information | |
|---|---|
| Original language | English |
| Type of outcome | Proceedings paper |
| Field of Study | 10305 Fluids and plasma physics |
| Country of publisher | Slovakia |
| Confidentiality degree | is not subject to a state or trade secret |
| RIV identification code | RIV/00216224:14310/03:00008477 |
| Organization unit | Faculty of Science |
| ISBN | 80-8040-195-0 |
| Keywords in English | Diamond; microwave plasma CVD |
| Tags | Diamond, microwave plasma CVD |
| Tags | International impact |
| Changed by | Changed by: prof. Mgr. Vít Kudrle, Ph.D., učo 2560. Changed: 5/1/2007 12:49. |
| Abstract |
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| We studied the growth of microcrystalline diamond films on pre-treated Si and WC-Co substrates by microwave plasma chemical vapour deposition (MPCVD). The pre-treatment was varied and its effect on diamond film was studied. |
| Links | |
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| GP202/01/P106, research and development project | Name: Studium plazmochemických procesů pomocí mikrovlnné a optické spektroskopie |
| Investor: Czech Science Foundation, Study of plasmachemical processes using microwave and optical spectroscopy | |
| ME 367, research and development project | Name: Výzkum a vývoj supertvrdých nanokrystalických kompositních materiálů |
| Investor: Ministry of Education, Youth and Sports of the CR, Research and development and industrializartion of novel super hard nanocrystalline materials | |
| MSM 143100003, plan (intention) | Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek |
| Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates | |
| OC 527.20, research and development project | Name: Plazmochemické depozice a plazmochemické opracování povrchu pevných substrátů |
| Investor: Ministry of Education, Youth and Sports of the CR, Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate | |
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