J 2003

Reduction of tungsten precursors in inductive rf discharge plasma reactors

JANČA, Jan, Marek ELIÁŠ and Vlastimil BROŽEK

Basic information

Original name

Reduction of tungsten precursors in inductive rf discharge plasma reactors

Authors

JANČA, Jan (203 Czech Republic, guarantor), Marek ELIÁŠ (203 Czech Republic) and Vlastimil BROŽEK (203 Czech Republic)

Edition

High Temperature Material Processes, New York, Begell House Inc.n New York 10920, 2003, 1093-3611

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10305 Fluids and plasma physics

Country of publisher

United States of America

Confidentiality degree

není předmětem státního či obchodního tajemství

Impact factor

Impact factor: 0.116

RIV identification code

RIV/00216224:14310/03:00009448

Organization unit

Faculty of Science

UT WoS

000189132300009

Keywords in English

tungsten; tungsten carbide; plasma reduction; plasma carbidization;inductive coupled .h.f. plasma reactor

Tags

Změněno: 9/8/2005 11:40, Mgr. Marek Eliáš, Ph.D.

Abstract

V originále

Ammonium paratungstate (APT) was reduced in inductively coupled h.f. plasma reactor(4 MHz,2 kW). As working gas was used hydrogen. If the mixture of hydrogen with hydrocarbon is used (methane, propan butane)it is possible to prepare also tungsten carbide in the ratio up to WC/W=80/20.

Links

MSM 143100003, plan (intention)
Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates
OC 527.20, research and development project
Name: Plazmochemické depozice a plazmochemické opracování povrchu pevných substrátů
Investor: Ministry of Education, Youth and Sports of the CR, Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate