Detailed Information on Publication Record
2003
Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry
OHLÍDAL, Ivan, Miloslav OHLÍDAL, Petr KLAPETEK, Vladimír ČUDEK, Miloš JÁKL et. al.Basic information
Original name
Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry
Authors
OHLÍDAL, Ivan (203 Czech Republic, guarantor), Miloslav OHLÍDAL (203 Czech Republic), Petr KLAPETEK (203 Czech Republic), Vladimír ČUDEK (203 Czech Republic) and Miloš JÁKL (203 Czech Republic)
Edition
Proceedings of SPIE, Bellingham, SPIE, 2003, 0277-786X
Other information
Language
English
Type of outcome
Článek v odborném periodiku
Field of Study
10306 Optics
Country of publisher
United States of America
Confidentiality degree
není předmětem státního či obchodního tajemství
RIV identification code
RIV/00216224:14310/03:00008532
Organization unit
Faculty of Science
UT WoS
000189405800028
Keywords in English
fims nonuniform in optical parameters; optical characterization
Změněno: 20/12/2004 12:02, prof. RNDr. Ivan Ohlídal, DrSc.
Abstract
V originále
In this paper, a new optical method for characterizing nonuniform thin films is employed. For applying this method the special experimental arrangement containing CCD camera as a detector is used. Using this experimental arrangement the spectral dependences of the local reflectances are obtained. After treating these experimental data the distributions of the values of the local thicknesses and local refractive index along a large areas of the substrates of the nonuniform films are found. Moreover, it is shown that this method can be used to determine strong nonuniformities in both the optical parameters.
Links
| GA101/01/1104, research and development project |
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| GA202/01/1110, research and development project |
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