| OHLÍDAL, Ivan, Daniel FRANTA, Miroslav FRUMAR, Jaroslav JEDELSKÝ and Jaroslav OMASTA. Influence of Composition, Exposure and Thermal Annealing on Optical Properties of As-S Chalcogenide Thin Films. Journal of Optoelectronics and Advanced Materials. Bucharest: INOE & INFM, 2004, vol. 6, No 1, p. 139-148. ISSN 1454-4164. |
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@article{555827,
author = {Ohlídal, Ivan and Franta, Daniel and Frumar, Miroslav and Jedelský, Jaroslav and Omasta, Jaroslav},
article_location = {Bucharest},
article_number = {1},
keywords = {As-S chalcogenide films; Ellipsometry; Combined spectrophotometric method; Amorphous materials; Optical constants},
language = {eng},
issn = {1454-4164},
journal = {Journal of Optoelectronics and Advanced Materials},
title = {Influence of Composition, Exposure and Thermal Annealing on Optical Properties of As-S Chalcogenide Thin Films},
url = {http://hydra.physics.muni.cz/~franta/bib/JOAM6_139.html},
volume = {6},
year = {2004}
}
TY - JOUR
ID - 555827
AU - Ohlídal, Ivan - Franta, Daniel - Frumar, Miroslav - Jedelský, Jaroslav - Omasta, Jaroslav
PY - 2004
TI - Influence of Composition, Exposure and Thermal Annealing on Optical Properties of As-S Chalcogenide Thin Films
JF - Journal of Optoelectronics and Advanced Materials
VL - 6
IS - 1
SP - 139-148
EP - 139-148
PB - INOE & INFM
SN - 14544164
KW - As-S chalcogenide films
KW - Ellipsometry
KW - Combined spectrophotometric method
KW - Amorphous materials
KW - Optical constants
UR - http://hydra.physics.muni.cz/~franta/bib/JOAM6_139.html
N2 - In this paper the influence of the technological conditions, i.e. As concentration, UV iradiation and anealing, on the optical constants, thickness and material parameters of chalcogenide As-S thin films is studied. For determining the values of the parameters mentioned the optical method based on interpreting experimental data consiting of spectral dependences of the transmittance measured at normal incidence and spectral dependences of the ellipsometric quantities measured for several incidence angles is used. Within the interpretation of the experimental data the Jellison-Modine dispersion model is employed. It is shown that this dispersion model is not suitable for interpreting the spectral dependences of the transmittance of the films studied. Moreover, within the interpretation of the experimental data the physical model containing on isotropic inhomogeneous layer covered with a non-absorbing overlayer is employed for representing the films under investigation.
ER -
OHLÍDAL, Ivan, Daniel FRANTA, Miroslav FRUMAR, Jaroslav JEDELSKÝ and Jaroslav OMASTA. Influence of Composition, Exposure and Thermal Annealing on Optical Properties of As-S Chalcogenide Thin Films. \textit{Journal of Optoelectronics and Advanced Materials}. Bucharest: INOE \&{} INFM, 2004, vol.~6, No~1, p.~139-148. ISSN~1454-4164.
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