FRANTA, Daniel, Ivan OHLÍDAL, Vilma BURŠÍKOVÁ and Lenka ZAJÍČKOVÁ. Optical Properties of Diamond-Like Carbon Films Containing SiOx Studied by the Combined Method of Spectroscopic Ellipsometry and Spectroscopic Reflectometry. Thin Solid Films. Oxford, UK: Elsevier science, 2004, 455-456, No 1, p. 393-398. ISSN 0040-6090. |
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@article{555829, author = {Franta, Daniel and Ohlídal, Ivan and Buršíková, Vilma and Zajíčková, Lenka}, article_location = {Oxford, UK}, article_number = {1}, keywords = {Ellipsometry; Reflection; Optical properties; Amorphous materials}, language = {eng}, issn = {0040-6090}, journal = {Thin Solid Films}, title = {Optical Properties of Diamond-Like Carbon Films Containing SiOx Studied by the Combined Method of Spectroscopic Ellipsometry and Spectroscopic Reflectometry}, url = {http://hydra.physics.muni.cz/~franta/bib/TSF455_393.html}, volume = {455-456}, year = {2004} }
TY - JOUR ID - 555829 AU - Franta, Daniel - Ohlídal, Ivan - Buršíková, Vilma - Zajíčková, Lenka PY - 2004 TI - Optical Properties of Diamond-Like Carbon Films Containing SiOx Studied by the Combined Method of Spectroscopic Ellipsometry and Spectroscopic Reflectometry JF - Thin Solid Films VL - 455-456 IS - 1 SP - 393-398 EP - 393-398 PB - Elsevier science SN - 00406090 KW - Ellipsometry KW - Reflection KW - Optical properties KW - Amorphous materials UR - http://hydra.physics.muni.cz/~franta/bib/TSF455_393.html N2 - In this paper the results of the study of the optical properties of diamond like carbon films with different amount of SiOx prepared by plasma enhanced chemical vapor deposition from a mixture of metane and hexamethyldisiloxane onto silicon substrates will be presented. These results have been obtained using the combined method based on a simultaneous interpretation of experimental data achieved with variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry within the near-UV and visible regions. For interpreting the experimental data our new dispersion model of the optical constants based on the parameterization of the density of electronic states has been employed. Within this model the new analytical three parameter dispersion formula has been derived. These three parameters are proportional to the pi and sigma valence electron densities. ER -
FRANTA, Daniel, Ivan OHLÍDAL, Vilma BURŠÍKOVÁ and Lenka ZAJÍČKOVÁ. Optical Properties of Diamond-Like Carbon Films Containing SiOx Studied by the Combined Method of Spectroscopic Ellipsometry and Spectroscopic Reflectometry. \textit{Thin Solid Films}. Oxford, UK: Elsevier science, 2004, 455-456, No~1, p.~393-398. ISSN~0040-6090.
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