| SLAVÍČEK, Pavel, Vilma BURŠÍKOVÁ, Antonín BRABLEC, Vratislav KAPIČKA and Miloš KLÍMA. Deposition of polymer films by rf discharge at atmospheric pressure. Czech. J. Phys. Praha: Institute of Physics Academy of Sciences, 2004, vol. 2004, No 54, p. C586-C591, 6 pp. ISSN 0011-4626. |
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@article{555865,
author = {Slavíček, Pavel and Buršíková, Vilma and Brablec, Antonín and Kapička, Vratislav and Klíma, Miloš},
article_location = {Praha},
article_number = {54},
keywords = {deposition of films; rf discharge; plasma diagnostics},
language = {eng},
issn = {0011-4626},
journal = {Czech. J. Phys.},
title = {Deposition of polymer films by rf discharge at atmospheric pressure},
volume = {2004},
year = {2004}
}
TY - JOUR
ID - 555865
AU - Slavíček, Pavel - Buršíková, Vilma - Brablec, Antonín - Kapička, Vratislav - Klíma, Miloš
PY - 2004
TI - Deposition of polymer films by rf discharge at atmospheric pressure
JF - Czech. J. Phys.
VL - 2004
IS - 54
SP - C586-C591
EP - C586-C591
PB - Institute of Physics Academy of Sciences
SN - 00114626
KW - deposition of films
KW - rf discharge
KW - plasma diagnostics
N2 - RF plasma nozzle at atmospheric pressure has been used for deposition of thin films. The mechanical properties of deposited films were studied using indentation technique. Special properties of RF discharges offer hopeful technological applications like deposition of thin solid films. The parameters of the plasma were investigated by spectral and optical methods. The powered RF electrode of the torch discharge plasma source is made from the metal or dielectric pipe with an inner diameter of 1 - 2 mm and with a length of several centimeters. The electrode is connected through the matching unit to the RF generator driven at the frequency of 13.56 MHz. The mixture of argon and n-hexane or HMDSO (hexamethyldisiloxane, C6H18Si2O) gas ows through the RF electrode at the pipe. Polymer films were deposited on the several substrates e.g. glass, brass polished plates and Si wafers.
ER -
SLAVÍČEK, Pavel, Vilma BURŠÍKOVÁ, Antonín BRABLEC, Vratislav KAPIČKA and Miloš KLÍMA. Deposition of polymer films by rf discharge at atmospheric pressure. \textit{Czech. J. Phys.}. Praha: Institute of Physics Academy of Sciences, 2004, vol.~2004, No~54, p.~C586-C591, 6 pp. ISSN~0011-4626.
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