| STRAŇÁK, Vítězslav, Pavel SLAVÍČEK, Zdeněk NAVRÁTIL, Petr ADÁMEK, Milan TICHÝ, Petr ŠPATENKA and David TRUNEC. Diagnostics of surfatron-generated plasma by probe measurements and emission spectroscopy. Czech. J. Phys. Praha: Institute of Physics Academy of Sciences, 2004, vol. 2004, No 54, p. C970-C975, 6 pp. ISSN 0011-4626. |
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@article{555948,
author = {Straňák, Vítězslav and Slavíček, Pavel and Navrátil, Zdeněk and Adámek, Petr and Tichý, Milan and Špatenka, Petr and Trunec, David},
article_location = {Praha},
article_number = {54},
keywords = {microwave plasma; surfatron; probe diagnostics; optical emission spectroscopy},
language = {eng},
issn = {0011-4626},
journal = {Czech. J. Phys.},
title = {Diagnostics of surfatron-generated plasma by probe measurements and emission spectroscopy},
volume = {2004},
year = {2004}
}
TY - JOUR
ID - 555948
AU - Straňák, Vítězslav - Slavíček, Pavel - Navrátil, Zdeněk - Adámek, Petr - Tichý, Milan - Špatenka, Petr - Trunec, David
PY - 2004
TI - Diagnostics of surfatron-generated plasma by probe measurements and emission spectroscopy
JF - Czech. J. Phys.
VL - 2004
IS - 54
SP - C970-C975
EP - C970-C975
PB - Institute of Physics Academy of Sciences
SN - 00114626
KW - microwave plasma
KW - surfatron
KW - probe diagnostics
KW - optical emission spectroscopy
N2 - Applications of plasma sources in technology, medicine and biomedicine are already known for a long time. Our work is focused on diagnostics and applications of a microwave plasma source in these areas. The diagnosed microwave-driven plasma source consists of a surfatron powered by a microwave magnetron generator, working at 2.45 GHz in the output power range (0 - 300) W, which creates plasma from the working gas flowing through the quartz nozzle. We present results of diagnostics of generated plasma at nozzle exit at different experimental conditions: variable absorbed power, total chamber pressure etc. The diagnostics of plasma column was performed by means of double Langmuir probe measurement and optical emission spectroscopy.
ER -
STRAŇÁK, Vítězslav, Pavel SLAVÍČEK, Zdeněk NAVRÁTIL, Petr ADÁMEK, Milan TICHÝ, Petr ŠPATENKA and David TRUNEC. Diagnostics of surfatron-generated plasma by probe measurements and emission spectroscopy. \textit{Czech. J. Phys.}. Praha: Institute of Physics Academy of Sciences, 2004, vol.~2004, No~54, p.~C970-C975, 6 pp. ISSN~0011-4626.
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