STRAŇÁK, Vítězslav, Zdeněk NAVRÁTIL, Pavel SLAVÍČEK, Petr ŠPATENKA, Milan TICHÝ and David TRUNEC. Optical emission spectroscopy of argon plasma generated by surfatron at frequency 2.45 GHz. In CIUPINA, V., G. MUSA and R. VLADOIU. Proceedings of the 17th Escampig 2004. Constanta, Romania: Ovidius University of Constanta, 2004, p. 181-183.
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Basic information
Original name Optical emission spectroscopy of argon plasma generated by surfatron at frequency 2.45 GHz
Authors STRAŇÁK, Vítězslav (203 Czech Republic), Zdeněk NAVRÁTIL (203 Czech Republic), Pavel SLAVÍČEK (203 Czech Republic), Petr ŠPATENKA (203 Czech Republic), Milan TICHÝ (203 Czech Republic) and David TRUNEC (203 Czech Republic, guarantor).
Edition Constanta, Romania, Proceedings of the 17th Escampig 2004, p. 181-183, 3 pp. 2004.
Publisher Ovidius University of Constanta
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 10305 Fluids and plasma physics
Country of publisher Romania
Confidentiality degree is not subject to a state or trade secret
Organization unit Faculty of Science
Keywords in English surfatron plasma; argon; optical emission spectroscopy
Tags argon, optical emission spectroscopy, surfatron plasma
Changed by Changed by: doc. Mgr. Zdeněk Navrátil, Ph.D., učo 3323. Changed: 15/9/2004 12:01.
Abstract
The paper presents results of optical emission spectroscopy study of surfatron-based argon plasma. Plasma is formed in quartz tube, which is placed in the surfatron cavity powered by a microwave magnetron generator working with frequency 2.45 GHz. The plasma inside the tube is sustained downstream by a surface wave, which propagates along the plasma column. The quartz nozzle ends in a vacuum chamber pumped by a rotary oil pump. The pressure inside the chamber as well as the flow rate of the working gas is independently variable. We estimated plasma parameters as rotational and vibrational temperature from the measured spectra of OH and N2.
Links
GA202/02/0880, research and development projectName: Depozice tenkých vrstev a modifikace povrchů v tichém a doutnavém výboji za atmosférického tlaku
Investor: Czech Science Foundation, Deposition of thin films and surface modifications in silent and glow discharges at atmospheric pressure
MSM 143100003, plan (intention)Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates
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