MEŠKO, Marcel, Peter CICMAN, Y. OHTSU, H. FUJITA a Vít KUDRLE. Energy distribution functions of ions impinging on substrate in microwave plasma. Journal of physics D: Applied physics. Bristol, England: IOP Publishing Ltd., roč. 37, č. 3, s. 438-444. ISSN 0022-3727. 2004. |
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@article{559067, author = {Meško, Marcel and Cicman, Peter and Ohtsu, Y. and Fujita, H. and Kudrle, Vít}, article_location = {Bristol, England}, article_number = {3}, keywords = {IEDF; large area microwave plasma; sheath}, language = {eng}, issn = {0022-3727}, journal = {Journal of physics D: Applied physics}, title = {Energy distribution functions of ions impinging on substrate in microwave plasma}, volume = {37}, year = {2004} }
TY - JOUR ID - 559067 AU - Meško, Marcel - Cicman, Peter - Ohtsu, Y. - Fujita, H. - Kudrle, Vít PY - 2004 TI - Energy distribution functions of ions impinging on substrate in microwave plasma JF - Journal of physics D: Applied physics VL - 37 IS - 3 SP - 438-444 EP - 438-444 PB - IOP Publishing Ltd. SN - 00223727 KW - IEDF KW - large area microwave plasma KW - sheath N2 - Using retarding field energy analyser, we measured ion energy distribution function of positive ions impinging on substrate in microwave plasma ER -
MEŠKO, Marcel, Peter CICMAN, Y. OHTSU, H. FUJITA a Vít KUDRLE. Energy distribution functions of ions impinging on substrate in microwave plasma. \textit{Journal of physics D: Applied physics}. Bristol, England: IOP Publishing Ltd., roč.~37, č.~3, s.~438-444. ISSN~0022-3727. 2004.
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