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@inproceedings{560128,
author = {Straňák, Vítězslav and Navrátil, Zdeněk and Slavíček, Pavel and Šerý, M. and Tichý, Milan and Špatenka, Petr and Trunec, David},
address = {Nice, France},
booktitle = {Proceedings of 12th International Congress on Plasma Physics},
keywords = {surfatron plasma; argon; helium; probes; optical emission spectroscopy},
language = {eng},
location = {Nice, France},
pages = {00002043-2048},
publisher = {Euratom-CEA},
title = {Comparative diagnostics of Ar and He surfatron generated plasma by means of optical emission spectroscopy and probe measurements},
year = {2004}
}
TY - JOUR
ID - 560128
AU - Straňák, Vítězslav - Navrátil, Zdeněk - Slavíček, Pavel - Šerý, M. - Tichý, Milan - Špatenka, Petr - Trunec, David
PY - 2004
TI - Comparative diagnostics of Ar and He surfatron generated plasma by means of optical emission spectroscopy and probe measurements
PB - Euratom-CEA
CY - Nice, France
KW - surfatron plasma
KW - argon
KW - helium
KW - probes
KW - optical emission spectroscopy
N2 - The article is focused on comparative diagnostics of microwave plasmas, generated by surfatron, where Ar and He are used as carrier gases, N2 is used as reactive gas. The diagnosed microwave-driven plasma source consists of a surfatron powered by a microwave magnetron generator, working at frequency 2.45 GHz in the output power range 0-300 W, which creates plasma from the flowing working gas in a quartz nozzle. The gas flow rate is kept typically constant at 600 sccm but ratio of carrier gas and reactive gas is varied. We present some results of diagnostics of generated plasma at nozzle exit as well as in the nozzle at different experimental conditions: variable absorbed power, total chamber pressure etc. The diagnostics of plasma column was performed by means of double probe measurement (mainly electron temperature is calculated from measured data) and by optical emission spectroscopy (rotational and vibrational temperatures, estimation of plasma composition from overview spectra).
ER -
STRAŇÁK, Vítězslav, Zdeněk NAVRÁTIL, Pavel SLAVÍČEK, M. ŠERÝ, Milan TICHÝ, Petr ŠPATENKA and David TRUNEC. Comparative diagnostics of Ar and He surfatron generated plasma by means of optical emission spectroscopy and probe measurements. In \textit{Proceedings of 12th International Congress on Plasma Physics}. Nice, France: Euratom-CEA, 2004, p.~00002043-2048.
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