Detailed Information on Publication Record
2004
Comparative diagnostics of Ar and He surfatron generated plasma by means of optical emission spectroscopy and probe measurements
STRAŇÁK, Vítězslav, Zdeněk NAVRÁTIL, Pavel SLAVÍČEK, M. ŠERÝ, Milan TICHÝ et. al.Basic information
Original name
Comparative diagnostics of Ar and He surfatron generated plasma by means of optical emission spectroscopy and probe measurements
Name in Czech
Porovnání Ar a He plazmutu generovaného surfatronem pomocí optické emisní spektroskopie
Authors
STRAŇÁK, Vítězslav (203 Czech Republic), Zdeněk NAVRÁTIL (203 Czech Republic), Pavel SLAVÍČEK (203 Czech Republic), M. ŠERÝ (203 Czech Republic), Milan TICHÝ (203 Czech Republic), Petr ŠPATENKA (203 Czech Republic, guarantor) and David TRUNEC (203 Czech Republic)
Edition
Nice, France, Proceedings of 12th International Congress on Plasma Physics, p. 00002043-2048, 2004
Publisher
Euratom-CEA
Other information
Language
English
Type of outcome
Stať ve sborníku
Field of Study
10305 Fluids and plasma physics
Country of publisher
France
Confidentiality degree
není předmětem státního či obchodního tajemství
RIV identification code
RIV/00216224:14310/04:00019796
Organization unit
Faculty of Science
Keywords in English
surfatron plasma; argon; helium; probes; optical emission spectroscopy
Změněno: 26/6/2007 13:28, doc. Mgr. Pavel Slavíček, Ph.D.
V originále
The article is focused on comparative diagnostics of microwave plasmas, generated by surfatron, where Ar and He are used as carrier gases, N2 is used as reactive gas. The diagnosed microwave-driven plasma source consists of a surfatron powered by a microwave magnetron generator, working at frequency 2.45 GHz in the output power range 0-300 W, which creates plasma from the flowing working gas in a quartz nozzle. The gas flow rate is kept typically constant at 600 sccm but ratio of carrier gas and reactive gas is varied. We present some results of diagnostics of generated plasma at nozzle exit as well as in the nozzle at different experimental conditions: variable absorbed power, total chamber pressure etc. The diagnostics of plasma column was performed by means of double probe measurement (mainly electron temperature is calculated from measured data) and by optical emission spectroscopy (rotational and vibrational temperatures, estimation of plasma composition from overview spectra).
In Czech
Porovnání Ar a He plazmutu generovaného surfatronem pomocí optické emisní spektroskopie
Links
| GA202/02/0880, research and development project |
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| MSM 143100003, plan (intention) |
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