Optical emission spectroscopy and probe measurement in Ar + N2 surfatron discharge

STRAŇÁK, Vítězslav, Michal ŠERÝ, J BLAŽEK, Zdeněk NAVRÁTIL, Pavel SLAVÍČEK and Milan TICHÝ. Optical emission spectroscopy and probe measurement in Ar + N2 surfatron discharge. In ŠAFRÁNKOVÁ, Jana. WDS'04 Proceedings of Contributed Papers: Part II - Physics of Plasmas and Ionized Media. Praha: Matfyzpress, 2004, p. 339-343, 6 pp. ISBN 80-86732-32-0.

Basic information

Original name

Optical emission spectroscopy and probe measurement in Ar + N2 surfatron discharge

Authors

STRAŇÁK, Vítězslav, Michal ŠERÝ, J BLAŽEK, Zdeněk NAVRÁTIL, Pavel SLAVÍČEK and Milan TICHÝ

Edition

Praha, WDS'04 Proceedings of Contributed Papers: Part II - Physics of Plasmas and Ionized Media, p. 339-343, 6 pp. 2004

Publisher

Matfyzpress

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Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Czech Republic

Confidentiality degree

není předmětem státního či obchodního tajemství

Organization unit

Faculty of Science

ISBN

80-86732-32-0

Keywords in English

surfatron generated plasma; probe measurements; optical emission spectroscopy; argon

Tags

argon, optical emission spectroscopy, probe measurements, surfatron generated plasma

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Abstract

V originále

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Links

GA202/02/0880, research and development project	Name: Depozice tenkých vrstev a modifikace povrchů v tichém a doutnavém výboji za atmosférického tlaku Investor: Czech Science Foundation, Deposition of thin films and surface modifications in silent and glow discharges at atmospheric pressure
MSM 143100003, plan (intention)	Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates