VAŠINA, Petr, Marcel MEŠKO, Jean-Christiphe IMBERT, Ludovic DE POUCQUEC, Lionel TEULE-GAY, Caroline BOISSE-LAPORTE, Jean BRETAGNE, Daniel PAGNON, Michel TOUZEAU a MIhai GANCIU. Spectroscopic analysis of a pulsed magnetron discharge. In Proceeding of Seventeenth European Conference on Atomic & Molecular Physics of Ionized Gases. Constanta, 2004, s. 117-118. |
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@inproceedings{564257, author = {Vašina, Petr and Meško, Marcel and Imbert, JeanandChristiphe and de Poucquec, Ludovic and TeuleandGay, Lionel and BoisseandLaporte, Caroline and Bretagne, Jean and Pagnon, Daniel and Touzeau, Michel and Ganciu, MIhai}, address = {Constanta}, booktitle = {Proceeding of Seventeenth European Conference on Atomic & Molecular Physics of Ionized Gases}, keywords = {pulsed magnetron; spectroscopy}, location = {Constanta}, pages = {117-118}, title = {Spectroscopic analysis of a pulsed magnetron discharge}, year = {2004} }
TY - JOUR ID - 564257 AU - Vašina, Petr - Meško, Marcel - Imbert, Jean-Christiphe - de Poucquec, Ludovic - Teule-Gay, Lionel - Boisse-Laporte, Caroline - Bretagne, Jean - Pagnon, Daniel - Touzeau, Michel - Ganciu, MIhai PY - 2004 TI - Spectroscopic analysis of a pulsed magnetron discharge CY - Constanta KW - pulsed magnetron KW - spectroscopy N2 - To investigate the generation and transport of ions during and after a high power current pulse applied on magnetron cathode used for IPVD, we performed spectroscopic measurement with time and space resolution. Two microwave antennas placed between target and substrate ensure proper condition of current pulse developement, ion transport and by re-excitating of sputtered species, allows spectroscopic emission measurements of species transport toward the substrate. ER -
VAŠINA, Petr, Marcel MEŠKO, Jean-Christiphe IMBERT, Ludovic DE POUCQUEC, Lionel TEULE-GAY, Caroline BOISSE-LAPORTE, Jean BRETAGNE, Daniel PAGNON, Michel TOUZEAU a MIhai GANCIU. Spectroscopic analysis of a pulsed magnetron discharge. In \textit{Proceeding of Seventeenth European Conference on Atomic \&{} Molecular Physics of Ionized Gases}. Constanta, 2004, s.~117-118.
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