Detailed Information on Publication Record
2004
Spectroscopic analysis of a pulsed magnetron discharge
VAŠINA, Petr, Marcel MEŠKO, Jean-Christiphe IMBERT, Ludovic DE POUCQUEC, Lionel TEULE-GAY et. al.Basic information
Original name
Spectroscopic analysis of a pulsed magnetron discharge
Name in Czech
Spektroskopická analýsa pulzního magnetronového výboje
Name (in English)
Spectroscopic analysis of a pulsed magnetron discharge
Authors
VAŠINA, Petr, Marcel MEŠKO, Jean-Christiphe IMBERT, Ludovic DE POUCQUEC, Lionel TEULE-GAY, Caroline BOISSE-LAPORTE, Jean BRETAGNE, Daniel PAGNON, Michel TOUZEAU and MIhai GANCIU
Edition
Constanta, Proceeding of Seventeenth European Conference on Atomic & Molecular Physics of Ionized Gases, p. 117-118, 2 pp. 2004
Other information
Type of outcome
Stať ve sborníku
Confidentiality degree
není předmětem státního či obchodního tajemství
Organization unit
Faculty of Science
UT WoS
000232894100028
Keywords in English
pulsed magnetron; spectroscopy
Tags
Změněno: 13/1/2005 12:24, prof. Mgr. Petr Vašina, Ph.D.
V originále
To investigate the generation and transport of ions during and after a high power current pulse applied on magnetron cathode used for IPVD, we performed spectroscopic measurement with time and space resolution. Two microwave antennas placed between target and substrate ensure proper condition of current pulse developement, ion transport and by re-excitating of sputtered species, allows spectroscopic emission measurements of species transport toward the substrate.
In Czech
Optická emisní spektroskopie byla použita k sledování generace a transportu částic v IPVD reaktoru. Mezi magnetronem a substrátem byly umístěny dvě mikrovlnné antény, které napomáhaly spravnému vývoji proudového pulzu a navíc, re-excitovali rozprášené částice, které se pohybovali směrem k substratu. Transport pal bylo možno sledovat optickou emisní spektroskopií.
In English
To investigate the generation and transport of ions during and after a high power current pulse applied on magnetron cathode used for IPVD, we performed spectroscopic measurement with time and space resolution. Two microwave antennas placed between target and substrate ensure proper condition of current pulse developement, ion transport and by re-excitating of sputtered species, allows spectroscopic emission measurements of species transport toward the substrate.