MIKULÍK, Petr. Project of a clean room laboratory for silicon device technology at the Masaryk University. In Proceedings of International Conference Silicon-2004. Rožnov pod Radhoštěm: Karel Vojtěchovský, 2004, p. 54-55.
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Basic information
Original name Project of a clean room laboratory for silicon device technology at the Masaryk University
Name in Czech Projekt laboratoře čistých prostor pro křemíkovou technologii čipů na Masarykově univerzitě
Authors MIKULÍK, Petr (203 Czech Republic, guarantor).
Edition Rožnov pod Radhoštěm, Proceedings of International Conference Silicon-2004, p. 54-55, 2 pp. 2004.
Publisher Karel Vojtěchovský
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 10302 Condensed matter physics
Country of publisher Czech Republic
Confidentiality degree is not subject to a state or trade secret
RIV identification code RIV/00216224:14310/04:00010943
Organization unit Faculty of Science
Keywords in English clean room; silicon; chip
Tags chip, clean room, Silicon
Changed by Changed by: doc. RNDr. Petr Mikulík, Ph.D., učo 855. Changed: 10/2/2005 14:46.
Abstract
The paper presents ideas, motivation and plans the the projection of a clean room laboratory for silicon device technology at the Masaryk University.
Abstract (in Czech)
Práce popisuje myšlenky, motivaci a plán pro projekt laboratoře čistých prostor pro křemíkovou technologii čipů na Masarykově univerzitě.
Links
MSM 143100002, plan (intention)Name: Fyzikální vlastnosti nových materiálů a vrstevnatých struktur
Investor: Ministry of Education, Youth and Sports of the CR, Physical properties of new materials and layered structures
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