| BRANDEJSOVÁ, Eva, Jan ČECHAL, Olga BONAVENTUROVÁ ZRZAVECKÁ, Alois NEBOJSA, Petr TICHOPÁDEK, Michal URBÁNEK, Karel NAVRÁTIL, Tomáš ŠIKOLA and Josef HUMLÍČEK. In situ analysis of PMPSi thin films by spectroscopic ellipsometry. Jemná mechanika a optika. Přerov: Physical Institute, ASCR, 2004, 9/2004, No 9, p. 260-262. ISSN 0447-6441. |
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@article{566971,
author = {Brandejsová, Eva and Čechal, Jan and Bonaventurová Zrzavecká, Olga and Nebojsa, Alois and Tichopádek, Petr and Urbánek, Michal and Navrátil, Karel and Šikola, Tomáš and Humlíček, Josef},
article_location = {Přerov},
article_number = {9},
keywords = {spectroscopic ellipsometry; poly(methyl-phenylsilane)},
language = {eng},
issn = {0447-6441},
journal = {Jemná mechanika a optika},
title = {In situ analysis of PMPSi thin films by spectroscopic ellipsometry},
volume = {9/2004},
year = {2004}
}
TY - JOUR
ID - 566971
AU - Brandejsová, Eva - Čechal, Jan - Bonaventurová Zrzavecká, Olga - Nebojsa, Alois - Tichopádek, Petr - Urbánek, Michal - Navrátil, Karel - Šikola, Tomáš - Humlíček, Josef
PY - 2004
TI - In situ analysis of PMPSi thin films by spectroscopic ellipsometry
JF - Jemná mechanika a optika
VL - 9/2004
IS - 9
SP - 260-262
EP - 260-262
PB - Physical Institute, ASCR
SN - 04476441
KW - spectroscopic ellipsometry
KW - poly(methyl-phenylsilane)
N2 - In the paper in situ monitoring of the UV-light-and thermal treatment of PMPSi thin films by real time spectroscopic ellipsometry and additional ex situ measurements are reported. In the in situ experiments the films were treated both under ultrahigh vacuum and oxygen atmosphere. The results of this study indicate systematic shift of the imaginary part of a complex dielectric function depending on the degree of treatment.
ER -
BRANDEJSOVÁ, Eva, Jan ČECHAL, Olga BONAVENTUROVÁ ZRZAVECKÁ, Alois NEBOJSA, Petr TICHOPÁDEK, Michal URBÁNEK, Karel NAVRÁTIL, Tomáš ŠIKOLA and Josef HUMLÍČEK. In situ analysis of PMPSi thin films by spectroscopic ellipsometry. \textit{Jemná mechanika a optika}. Přerov: Physical Institute, ASCR, 2004, 9/2004, No~9, p.~260-262. ISSN~0447-6441.
|
