Depth profile studies of ZrTiN coatings by laser ablation inductively coupled plasma mass spectrometry

KANICKÝ, Viktor, Hans-Rudolf KUHN and Detlef GUENTHER. Depth profile studies of ZrTiN coatings by laser ablation inductively coupled plasma mass spectrometry. Analytical and Bioanalytical Chemistry. Heidelberg: Springer-Verlag GmbH, 2004, vol. 380, No 2, p. 218 - 226. ISSN 1618-2642.

Basic information

• Original name: Depth profile studies of ZrTiN coatings by laser ablation inductively coupled plasma mass spectrometry
• Name in Czech: Studium hloubkovch profil plazmov deponovanch povlak ZrTiN pomoc laserov ablace s hmotnostn spektrometri v indukn vzanm plazmatu
• Authors: KANICKÝ, Viktor (203 Czech Republic, guarantor), Hans-Rudolf KUHN (756 Switzerland) and Detlef GUENTHER (756 Switzerland).
• Edition: Analytical and Bioanalytical Chemistry, Heidelberg, Springer-Verlag GmbH, 2004, 1618-2642.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10406 Analytical chemistry
• Country of publisher: Germany
• Confidentiality degree: is not subject to a state or trade secret
• Impact factor: Impact factor: 2.098
• RIV identification code: RIV/00216224:14310/04:00011020
• Organization unit: Faculty of Science
• UT WoS: 000224528900007
• Keywords in English: Laser ablation - Inductively coupled plasma mass spectrometry - Excimer laser - Beam homogenizer - ZrTiN - Coating - Depth profiling - Depth resolution - Aspect ratio

Abstract

Abstract Feasibility of depth profiling was studied using a 193 nm ArF* excimer laser ablation system (GeoLas, MicroLas, Goettingen, Germany) with the lens-array-based beam homogenizer in combination with ICP-QMS Agilent 7500. Two ablation cells (20 cm3 and 1.5 cm3) were compared at the laser repetition rate of 1Hz, laser beam energy of 135 mJ and the carrier gas flow rate 1.5 L/min He + 0.78 L/min Ar. Dimensions of ablation cell are important parameters for signal tailing, however; very small cell volumes (e.g. 1.5 cm3) may cause memory effects, which can be probably explained by dominant inertial losses of aerosol on cell walls with its delayed mobilization. The 20-cm3-ablation cell seems to be appropriate for depth profiling by continuous single-hole drilling. The study of influence of the pit diameter magnitude on courses of waning and emerging signals under small crater depth/diameter aspect ratio, which ranges between 0.75 and 0.0375 for the 3-ěm thick coatings and pit diameters 4-80 ěm, revealed that the steady-state signals of pure coating and pure substrate (out of interface) were obtained at crater diameters between 20-40 ěm. Depth resolution defined by means of slopes of tangents in the layer interface region depends on the pit diameter with optimum in the range of 20-40 ěm and makes 0.6 ěm for 20-ěm pit. In-depth variation of concentration of coating constituent (Ti) was proved almost identically using two different laser/ICP systems.

Abstract (in Czech)

Abstract Feasibility of depth profiling was studied using a 193 nm ArF* excimer laser ablation system (GeoLas, MicroLas, Goettingen, Germany) with the lens-array-based beam homogenizer in combination with ICP-QMS Agilent 7500. Two ablation cells (20 cm3 and 1.5 cm3) were compared at the laser repetition rate of 1Hz, laser beam energy of 135 mJ and the carrier gas flow rate 1.5 L/min He + 0.78 L/min Ar. Dimensions of ablation cell are important parameters for signal tailing, however; very small cell volumes (e.g. 1.5 cm3) may cause memory effects, which can be probably explained by dominant inertial losses of aerosol on cell walls with its delayed mobilization. The 20-cm3-ablation cell seems to be appropriate for depth profiling by continuous single-hole drilling. The study of influence of the pit diameter magnitude on courses of waning and emerging signals under small crater depth/diameter aspect ratio, which ranges between 0.75 and 0.0375 for the 3-ěm thick coatings and pit diameters 4-80 ěm, revealed that the steady-state signals of pure coating and pure substrate (out of interface) were obtained at crater diameters between 20-40 ěm. Depth resolution defined by means of slopes of tangents in the layer interface region depends on the pit diameter with optimum in the range of 20-40 ěm and makes 0.6 ěm for 20-ěm pit. In-depth variation of concentration of coating constituent (Ti) was proved almost identically using two different laser/ICP systems.

Links

• MSM 143100003, plan (intention): Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates