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@article{570643,
author = {Jašek, Ondřej and Eliáš, Marek and Frgala, Zdeněk and Matějková, Jiřina and Rek, Antonín and Kadlečíková, Magdaléna},
article_location = {Switzerland},
article_number = {1},
keywords = {high resolution scanning microscopy; carbon nanostructures; diamond; nanotubes},
language = {eng},
issn = {0255-5476},
journal = {Material Science Forum},
title = {Study of carbon films on silicon substrate},
url = {http://www.scientific.net/default.cfm?pdf=1&issn=0255-5476&pg=1&ppg=21&paper=203&isbn=0-87849-964-4},
volume = {482},
year = {2005}
}
TY - JOUR
ID - 570643
AU - Jašek, Ondřej - Eliáš, Marek - Frgala, Zdeněk - Matějková, Jiřina - Rek, Antonín - Kadlečíková, Magdaléna
PY - 2005
TI - Study of carbon films on silicon substrate
JF - Material Science Forum
VL - 482
IS - 1
SP - 203-206
EP - 203-206
PB - Trans Tech Publications
SN - 02555476
KW - high resolution scanning microscopy
KW - carbon nanostructures
KW - diamond
KW - nanotubes
UR - http://www.scientific.net/default.cfm?pdf=1&issn=0255-5476&pg=1&ppg=21&paper=203&isbn=0-87849-964-4
N2 - Carbon based films on silicon substrates have been studied by high resolution FE SEM equipped by an EDS analyzer. The first type are carbon nanotube (CNT) films prepared on Si/SiO2 substrates with Ni or Fe layers by radiofrequency plasma chemical vapor deposition. Dependence of nanotube films properties on Ni and Fe thickness and deposition conditions have been studied. The second type of films discussed are microcrystalline and nanocrystalline diamond films grown on pre-treated Si substrates by microwave plasma chemical vapor deposition (MPCVD). The pre-treatment was varied and its effect on diamond films was studied.
ER -
JAŠEK, Ondřej, Marek ELIÁŠ and Zdeněk FRGALA. Study of carbon films on silicon substrate. \textit{Material Science Forum}. Switzerland: Trans Tech Publications, 2005, vol.~482, No~1, p.~203-206. ISSN~0255-5476.
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