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@article{570643, author = {Jašek, Ondřej and Eliáš, Marek and Frgala, Zdeněk and Matějková, Jiřina and Rek, Antonín and Kadlečíková, Magdaléna}, article_location = {Switzerland}, article_number = {1}, keywords = {high resolution scanning microscopy; carbon nanostructures; diamond; nanotubes}, language = {eng}, issn = {0255-5476}, journal = {Material Science Forum}, title = {Study of carbon films on silicon substrate}, url = {http://www.scientific.net/default.cfm?pdf=1&issn=0255-5476&pg=1&ppg=21&paper=203&isbn=0-87849-964-4}, volume = {482}, year = {2005} }
TY - JOUR ID - 570643 AU - Jašek, Ondřej - Eliáš, Marek - Frgala, Zdeněk - Matějková, Jiřina - Rek, Antonín - Kadlečíková, Magdaléna PY - 2005 TI - Study of carbon films on silicon substrate JF - Material Science Forum VL - 482 IS - 1 SP - 203-206 EP - 203-206 PB - Trans Tech Publications SN - 02555476 KW - high resolution scanning microscopy KW - carbon nanostructures KW - diamond KW - nanotubes UR - http://www.scientific.net/default.cfm?pdf=1&issn=0255-5476&pg=1&ppg=21&paper=203&isbn=0-87849-964-4 N2 - Carbon based films on silicon substrates have been studied by high resolution FE SEM equipped by an EDS analyzer. The first type are carbon nanotube (CNT) films prepared on Si/SiO2 substrates with Ni or Fe layers by radiofrequency plasma chemical vapor deposition. Dependence of nanotube films properties on Ni and Fe thickness and deposition conditions have been studied. The second type of films discussed are microcrystalline and nanocrystalline diamond films grown on pre-treated Si substrates by microwave plasma chemical vapor deposition (MPCVD). The pre-treatment was varied and its effect on diamond films was studied. ER -
JAŠEK, Ondřej, Marek ELIÁŠ and Zdeněk FRGALA. Study of carbon films on silicon substrate. \textit{Material Science Forum}. Switzerland: Trans Tech Publications, 2005, vol.~482, No~1, p.~203-206. ISSN~0255-5476.
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