| HELFEN, L., T. BAUMBACH, Petr MIKULÍK, D. KIEL, P. PERNOT, P. CLOETENS and J. BARUCHEL. High-resolution three-dimensional imaging of flat objects by synchrotron-radiation computed laminography. Applied Physics Letters. USA: American Institute of Physics, 2005, vol. 86, No 1, p. 071915-1, 3 pp. ISSN 0003-6951. |
Other formats:
BibTeX
LaTeX
RIS
@article{573337,
author = {Helfen, L. and Baumbach, T. and Mikulík, Petr and Kiel, D. and Pernot, P. and Cloetens, P. and Baruchel, J.},
article_location = {USA},
article_number = {1},
keywords = {laminography; tomography; synchrotron radiation; NDT},
language = {eng},
issn = {0003-6951},
journal = {Applied Physics Letters},
title = {High-resolution three-dimensional imaging of flat objects by synchrotron-radiation computed laminography},
url = {http://www.sci.muni.cz/~mikulik/Publications.html#HelfenBaumbachMikulik-APL-2005},
volume = {86},
year = {2005}
}
TY - JOUR
ID - 573337
AU - Helfen, L. - Baumbach, T. - Mikulík, Petr - Kiel, D. - Pernot, P. - Cloetens, P. - Baruchel, J.
PY - 2005
TI - High-resolution three-dimensional imaging of flat objects by synchrotron-radiation computed laminography
JF - Applied Physics Letters
VL - 86
IS - 1
SP - 071915-1
EP - 071915-1
PB - American Institute of Physics
SN - 00036951
KW - laminography
KW - tomography
KW - synchrotron radiation
KW - NDT
UR - http://www.sci.muni.cz/~mikulik/Publications.html#HelfenBaumbachMikulik-APL-2005
N2 - Computed laminography with synchrotron radiation is developed and carried out for three-dimensional imaging of flat, laterally extended objects with high spatial resolution. Particular experimental conditions of a stationary synchrotron source have been taken into account by a scanning geometry different from that employed with movable conventional laboratory x-ray sources. Depending on the mechanical precision of the sample manipulation system, high spatial resolution down to the scale of 1 um can be attained nondestructively, even for objects of large lateral size. Furthermore, high beam intensity and the parallel-beam geometry enables easy use of monochromatic radiation for optimizing contrast and reducing imaging artifacts. Simulations and experiments on a test object demonstrate the feasibility of the method. Application to the inspection of solder joints in a flip-chip bonded device shows the potential for quality assurance of microsystem devices.
ER -
HELFEN, L., T. BAUMBACH, Petr MIKULÍK, D. KIEL, P. PERNOT, P. CLOETENS and J. BARUCHEL. High-resolution three-dimensional imaging of flat objects by synchrotron-radiation computed laminography. \textit{Applied Physics Letters}. USA: American Institute of Physics, 2005, vol.~86, No~1, p.~071915-1, 3 pp. ISSN~0003-6951.
|
