Complex study of the mechanical properties of a-Si:H and a-SiC:H thin films
| BURŠÍKOVÁ, Vilma, Petr SLÁDEK, Pavel SŤAHEL and Jiří BURŠÍK. Complex study of the mechanical properties of a-Si:H and a-SiC:H thin films. In Book of abstract - ICANS 21. Lisbon: Universidade Nova de Lisboa, 2005, p. 162. ISBN 972-8893-04-3. |
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| Basic information | |
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| Original name | Complex study of the mechanical properties of a-Si:H and a-SiC:H thin films |
| Name in Czech | Komplexní studium mechanických vlastností tenkých vrstev a-Si:H , a-SiC:H |
| Authors | BURŠÍKOVÁ, Vilma (203 Czech Republic), Petr SLÁDEK (203 Czech Republic, guarantor), Pavel SŤAHEL (203 Czech Republic) and Jiří BURŠÍK (203 Czech Republic). |
| Edition | Lisbon, Book of abstract - ICANS 21, p. 162-162, 2005. |
| Publisher | Universidade Nova de Lisboa |
| Other information | |
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| Original language | English |
| Type of outcome | Proceedings paper |
| Field of Study | 10302 Condensed matter physics |
| Country of publisher | Portugal |
| Confidentiality degree | is not subject to a state or trade secret |
| RIV identification code | RIV/00216224:14310/05:00012628 |
| Organization unit | Faculty of Science |
| ISBN | 972-8893-04-3 |
| Keywords in English | amorphous semiconductor; mechanical properties; thin film |
| Tags | amorphous semiconductor, mechanical properties, thin film |
| Changed by | Changed by: doc. RNDr. Vilma Buršíková, Ph.D., učo 2418. Changed: 3/1/2006 16:37. |
| Abstract |
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| The aim of this study is to provide the complex study of the mechanical properties of a-SiH and a-SiC:H thin films prepared under different plasma conditions. |
| Abstract (in Czech) |
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| Cílem práce je komplexní studium mechanických vlastností tenkých vrstev a-Si:H a a-SiC:H připravených v plazmatu za různých depozičních podmínek. |
| Links | |
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| GA106/05/0274, research and development project | Name: Víceúrovňové studium vztahů mezi mechanickými a mikrostrukturními charakteristikami materiálů |
| Investor: Czech Science Foundation, Multiscale approach to relationships between mechanical and microstructural characteristics of materials | |
| MSM0021622411, plan (intention) | Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek |
| Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface | |
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