The Role of Secondary Electrons in Low Pressure rf Glow Discharge

BRZOBOHATÝ, Oto and David TRUNEC. The Role of Secondary Electrons in Low Pressure rf Glow Discharge. In WDS 2005 - Proceedings of Contributed Papers. Prague: MATFYZPRESS, 2005, p. 306-313, 6 pp. ISBN 80-86732-59-2.

Basic information

• Original name: The Role of Secondary Electrons in Low Pressure rf Glow Discharge
• Name in Czech: Role sekundarních elektronů v nízkotlakém rf doutnavém výboji
• Authors: BRZOBOHATÝ, Oto (203 Czech Republic) and David TRUNEC (203 Czech Republic, guarantor).
• Edition: Prague, WDS 2005 - Proceedings of Contributed Papers, p. 306-313, 6 pp. 2005.
• Publisher: MATFYZPRESS

Other information

• Original language: English
• Type of outcome: Proceedings paper
• Field of Study: 10305 Fluids and plasma physics
• Country of publisher: Czech Republic
• Confidentiality degree: is not subject to a state or trade secret
• RIV identification code: RIV/00216224:14310/05:00024543
• Organization unit: Faculty of Science
• ISBN: 80-86732-59-2
• Keywords in English: computer simulation; rf glow discharg; secondary electrons
• Tags: computer simulation, rf glow discharg, secondary electrons
• Tags: Reviewed

Abstract

We concerned on the role of secondary electrons in low pressure rf glow discharge. The Particle in Cell/Monte Carlo computer simulations (PIC/MC) was applied to simulate the discharge. The influence of secondary electron emission yield (SEY) on the plasma density was studied. Furthermore the relative density and the electron energy probability function of secondary particles, i.e., secondary electrons and the products of ionizing collisions of secondary electrons was determined. We found that the secondary particles play very important role in this type of discharge. The relative density of secondary electrons created on electrodes is 2-10%, 5-15% for the value of SEY = 0.1, 0.2 respectively. But due to the high electric intensity in electrode sheaths these electrons have relatively high energy and therefore they can ionize neutral atoms. As consequence of this the relative density of the secondary electrons (secondaries) and electrons created in ionizing collisions of the secondaries is more than 20% and the relative density of ions created in ionizing collisions of the secondaries is more than 20%, 40% for value of SEY = 0.1, 0.2, respectively.

Abstract (in Czech)

V práci byla studována role sekundárních elektronů ve vf nízkotlakém doutnavém výboji. Ke studiu byla použita počítačová simulace (metoda PIC/MC). Byl studován vliv koeficientu sekundární emise (SEY) na koncentraci plazmatu. Dále byla určena relativní koncentrace a energiová rozdělovací funkce. Relativní koncentrace elektronů (vzhledem k celkové koncntraci plazmatu), vzniklých na elektrodě je 2-10% pro SEY = 0,1, resp. 5-15% pro SEY = 0,2. Díky vysoké intenzitě el. pole v elektrodové vrstvě získají tyto elektrony vysokou energii ionizují neutrální částice. Relativní koncentrace elektronů i iontů, vzniklých z ionizace sec. ele., je více než 20%.

Links

• GA202/03/0827, research and development project: Name: Studium elementárních procesů v nízkoteplotním a technologicky orientovaném plazmatu a vývoj relevantních diagnostických metod
• MSM0021622411, plan (intention): Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface