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@inproceedings{592225, author = {Šmíd, Radek and Zajíčková, Lenka and Buršíková, Vilma}, address = {Eindhoven, Nizozemí}, booktitle = {Proceedings of the XXVII ICPIG}, edition = {1}, keywords = {actinometry; HMDSO; optical emission spectroscopy}, language = {eng}, location = {Eindhoven, Nizozemí}, isbn = {90-386-2231-7}, pages = {297-300}, publisher = {Eindhoven University of Technology, Nizozemí}, title = {Actinometry for understanding PECVD of thin films from O2/HMDSO plasmas}, url = {http://www.icpig2005.nl/cd/D:/Proceedings_ICPIG_2005.html}, year = {2005} }
TY - JOUR ID - 592225 AU - Šmíd, Radek - Zajíčková, Lenka - Buršíková, Vilma PY - 2005 TI - Actinometry for understanding PECVD of thin films from O2/HMDSO plasmas PB - Eindhoven University of Technology, Nizozemí CY - Eindhoven, Nizozemí SN - 9038622317 KW - actinometry KW - HMDSO KW - optical emission spectroscopy UR - http://www.icpig2005.nl/cd/D:/Proceedings_ICPIG_2005.html N2 - We applied actinometry for the calculation of dissociation degree in oxygen CCP discharges used for the deposition from O2/HMDSO plasmas. Dissociation degree exhibited a slight increase with increasing r.f. power and maximum of 20% for 5 Pa of oxygen. This relatively high value was not enough for deposition of SiO2-like films because the HMDSO percentage in the feed was too high at this low oxygen partial pressure. Rapid decrease of dissociation degree to 2-4% for higher oxygen flow rates, i.e. higher pressures resulted in still insufficient oxidation of film precursors. ER -
ŠMÍD, Radek, Lenka ZAJÍČKOVÁ and Vilma BURŠÍKOVÁ. Actinometry for understanding PECVD of thin films from O2/HMDSO plasmas. In \textit{Proceedings of the XXVII ICPIG}. 1st ed. Eindhoven, Nizozemí: Eindhoven University of Technology, Nizozemí, 2005, p.~297-300. ISBN~90-386-2231-7.
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