| FRANTA, Daniel, Vilma BURŠÍKOVÁ, Ivan OHLÍDAL, Lenka ZAJÍČKOVÁ and Pavel SŤAHEL. Thermal stability of the optical properties of plasma deposited diamond-like carbon thin films. Diamond and Related Materials. New York: Elsevier Science S.A., 2005, vol. 14, 11-12, p. 1795-1798. ISSN 0925-9635. |
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@article{593764,
author = {Franta, Daniel and Buršíková, Vilma and Ohlídal, Ivan and Zajíčková, Lenka and Sťahel, Pavel},
article_location = {New York},
article_number = {11-12},
keywords = {DLC; Thermal stability; optical properties; sp3/sp2 ratio},
language = {eng},
issn = {0925-9635},
journal = {Diamond and Related Materials},
title = {Thermal stability of the optical properties of plasma deposited diamond-like carbon thin films},
url = {http://hydra.physics.muni.cz/~franta/bib/DRM14_1795.html},
volume = {14},
year = {2005}
}
TY - JOUR
ID - 593764
AU - Franta, Daniel - Buršíková, Vilma - Ohlídal, Ivan - Zajíčková, Lenka - Sťahel, Pavel
PY - 2005
TI - Thermal stability of the optical properties of plasma deposited diamond-like carbon thin films
JF - Diamond and Related Materials
VL - 14
IS - 11-12
SP - 1795-1798
EP - 1795-1798
PB - Elsevier Science S.A.
SN - 09259635
KW - DLC
KW - Thermal stability
KW - optical properties
KW - sp3/sp2 ratio
UR - http://hydra.physics.muni.cz/~franta/bib/DRM14_1795.html
N2 - In present paper we studied the optical constants of the diamond-like carbon (DLC) films and their changes with annealing. The multisample modification of combined variable angle spectroscopic ellipsometry and near normal spectroscopic reflectometry was used. The optical constants of the DLC films were simulated by our recently published six-parameter dispersion model employing a parameterization of the density of electronic states (DOS). Based on the dispersion model parameters the density of and electrons were evaluated. We showed that from our model and the independently determined hydrogen atomic fraction of the films before and after annealing the ratio between momentum matrix elements of pi->pi* and sigma->sigma* transitions and the correct sp3-to-sp2 carbon bonding configuration ratio can be calculated. It is worth to notice that the first quantity is usually assumed to be equal to unity but we showed that this assumption may cause a significant error in the determination of the sp3-to-sp2 ratio. Therefore, our suggested method represents a novelty in this field.
ER -
FRANTA, Daniel, Vilma BURŠÍKOVÁ, Ivan OHLÍDAL, Lenka ZAJÍČKOVÁ and Pavel SŤAHEL. Thermal stability of the optical properties of plasma deposited diamond-like carbon thin films. \textit{Diamond and Related Materials}. New York: Elsevier Science S.A., 2005, vol.~14, 11-12, p.~1795-1798. ISSN~0925-9635.
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