| DE POUCQUES, Ludovic, Jean-Christophe IMBERT, Petr VAŠINA, Caroline BOISSE-LAPORTE, Lionel TEULÉ-GAY, Jean BRETAGNE and Michel TOUZEAU. Comparison of the ionisation efficiency in a microwave and a radio-frequency assisted magnetron discharge. Surface and Coating Technology. New York: ELSEVIER, 2005, vol. 200, 1-4, p. 800-803, 3 pp. ISSN 0257-8972. |
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@article{596504,
author = {de Poucques, Ludovic and Imbert, JeanandChristophe and Vašina, Petr and BoisseandLaporte, Caroline and TeuléandGay, Lionel and Bretagne, Jean and Touzeau, Michel},
article_location = {New York},
article_number = {1-4},
keywords = {IPVD; sputtering; magnetron discharge; microwave discharge; RF discharge; absorption spectroscopy},
language = {eng},
issn = {0257-8972},
journal = {Surface and Coating Technology},
title = {Comparison of the ionisation efficiency in a microwave and a radio-frequency assisted magnetron discharge},
volume = {200},
year = {2005}
}
TY - JOUR
ID - 596504
AU - de Poucques, Ludovic - Imbert, Jean-Christophe - Vašina, Petr - Boisse-Laporte, Caroline - Teulé-Gay, Lionel - Bretagne, Jean - Touzeau, Michel
PY - 2005
TI - Comparison of the ionisation efficiency in a microwave and a radio-frequency assisted magnetron discharge
JF - Surface and Coating Technology
VL - 200
IS - 1-4
SP - 800-803
EP - 800-803
PB - ELSEVIER
SN - 02578972
KW - IPVD
KW - sputtering
KW - magnetron discharge
KW - microwave discharge
KW - RF discharge
KW - absorption spectroscopy
N2 - Comparison of two sources of ionisation in an IPVD reactor, microwave and RF discharge.
ER -
DE POUCQUES, Ludovic, Jean-Christophe IMBERT, Petr VAŠINA, Caroline BOISSE-LAPORTE, Lionel TEULÉ-GAY, Jean BRETAGNE and Michel TOUZEAU. Comparison of the ionisation efficiency in a microwave and a radio-frequency assisted magnetron discharge. \textit{Surface and Coating Technology}. New York: ELSEVIER, 2005, vol.~200, 1-4, p.~800-803, 3 pp. ISSN~0257-8972.
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