| DE POUCQUES, Ludovic, Jean-Christophe IMBERT, Caroline BOISSE-LAPORTE, Petr VAŠINA, Jean BRETAGNE, Lionel TEULÉ-GAY a Michel TOUZEAU. Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements. Plasma Sources Science and Technology. Bristol: Institute of Physics Publishing, roč. 14, č. 2, s. 321-327. ISSN 0963-0252. 2005. |
Další formáty:
BibTeX
LaTeX
RIS
@article{596585,
author = {de Poucques, Ludovic and Imbert, JeanandChristophe and BoisseandLaporte, Caroline and Vašina, Petr and Bretagne, Jean and TeuléandGay, Lionel and Touzeau, Michel},
article_location = {Bristol},
article_number = {2},
keywords = {physical vapor deposition; ionised physical vapor deposition; titanium; metal ionisation; density; magnetron},
language = {eng},
issn = {0963-0252},
journal = {Plasma Sources Science and Technology},
title = {Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements},
volume = {14},
year = {2005}
}
TY - JOUR
ID - 596585
AU - de Poucques, Ludovic - Imbert, Jean-Christophe - Boisse-Laporte, Caroline - Vašina, Petr - Bretagne, Jean - Teulé-Gay, Lionel - Touzeau, Michel
PY - 2005
TI - Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements
JF - Plasma Sources Science and Technology
VL - 14
IS - 2
SP - 321
EP - 321
PB - Institute of Physics Publishing
SN - 09630252
KW - physical vapor deposition
KW - ionised physical vapor deposition
KW - titanium
KW - metal ionisation
KW - density
KW - magnetron
N2 - This paper deals with the characterization of an ionized physical vapour deposition (IPVD) reactor using an additional microwave plasma. The IPVD reactor was spatially characterized using optical emission spectroscopy, optical absorption spectroscopy and Langmuir probe measurements. A rectangular titanium target was used, the buffer gas was argon and the pressure was fixed at 4 Pa. The influence of the microwave power (between 0 and 900 W) and the magnetron discharge current (0.5 and 2 A) on the densities of the titanium species (neutral and ionic), argon emission line intensity and titanium and argon temperature variations was investigated. The titanium temperature and densities were measured using the pulsed resonant absorption spectroscopy technique. The neutral and ion fluxes on the substrate were deduced from these measurements. It was found that the ratio phi(Ti+)/phi(Ti-n) increases by a factor of 30 when additional microwave plasma is used. Moreover, we point out the temperature as a key parameter in plasma diagnostic interpretations.
ER -
DE POUCQUES, Ludovic, Jean-Christophe IMBERT, Caroline BOISSE-LAPORTE, Petr VAŠINA, Jean BRETAGNE, Lionel TEULÉ-GAY a Michel TOUZEAU. Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements. \textit{Plasma Sources Science and Technology}. Bristol: Institute of Physics Publishing, roč.~14, č.~2, s.~321-327. ISSN~0963-0252. 2005.
|
