Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements

DE POUCQUES, Ludovic, Jean-Christophe IMBERT, Caroline BOISSE-LAPORTE, Petr VAŠINA, Jean BRETAGNE, Lionel TEULÉ-GAY and Michel TOUZEAU. Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements. Plasma Sources Science and Technology. Bristol: Institute of Physics Publishing, 2005, vol. 14, No 2, p. 321-327. ISSN 0963-0252.

Basic information

• Original name: Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements
• Name in Czech: Prostorove rozlisena charakterizace IPVD reaktoru: teplota jako klicovy parametr pro interpretaci opticke emisni spektroskopie
• Authors: DE POUCQUES, Ludovic (250 France), Jean-Christophe IMBERT (250 France), Caroline BOISSE-LAPORTE (250 France), Petr VAŠINA (203 Czech Republic, guarantor), Jean BRETAGNE (250 France), Lionel TEULÉ-GAY (250 France) and Michel TOUZEAU (250 France).
• Edition: Plasma Sources Science and Technology, Bristol, Institute of Physics Publishing, 2005, 0963-0252.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10305 Fluids and plasma physics
• Country of publisher: United Kingdom of Great Britain and Northern Ireland
• Confidentiality degree: is not subject to a state or trade secret
• Impact factor: Impact factor: 1.798
• RIV identification code: RIV/00216224:14310/05:00012907
• Organization unit: Faculty of Science
• UT WoS: 000229918100023
• Keywords in English: physical vapor deposition; ionised physical vapor deposition; titanium; metal ionisation; density; magnetron
• Tags: Density, ionised physical vapor deposition, magnetron, metal ionisation, physical vapor deposition, titanium

Abstract

This paper deals with the characterization of an ionized physical vapour deposition (IPVD) reactor using an additional microwave plasma. The IPVD reactor was spatially characterized using optical emission spectroscopy, optical absorption spectroscopy and Langmuir probe measurements. A rectangular titanium target was used, the buffer gas was argon and the pressure was fixed at 4 Pa. The influence of the microwave power (between 0 and 900 W) and the magnetron discharge current (0.5 and 2 A) on the densities of the titanium species (neutral and ionic), argon emission line intensity and titanium and argon temperature variations was investigated. The titanium temperature and densities were measured using the pulsed resonant absorption spectroscopy technique. The neutral and ion fluxes on the substrate were deduced from these measurements. It was found that the ratio phi(Ti+)/phi(Ti-n) increases by a factor of 30 when additional microwave plasma is used. Moreover, we point out the temperature as a key parameter in plasma diagnostic interpretations.

Abstract (in Czech)

Studium IPVD reaktoru s Ti katodou. Teplota jako klicovy parametr pro interpretaci vysledku.

Links

• GD202/03/H162, research and development project: Name: Pokročilé směry ve fyzice a chemii plazmatu

Investor: Czech Science Foundation

• MSM0021622411, plan (intention): Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface