| VAŠINA, Petr, Marcel MEŠKO, Mihai GANCIU, Jean BRETAGNE, Caroline BOISSE-LAPORTE, Ludovic DE POUCQUES and Michel TOUZEAU. Reduction of transient regime in fast preionized high power pulsed magnetron discharge. Europhysics Letters. Paríž: European Physical Society, 2005, vol. 72, No 3, p. 390-395, 5 pp. ISSN 0295-5075. |
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@article{599364,
author = {Vašina, Petr and Meško, Marcel and Ganciu, Mihai and Bretagne, Jean and BoisseandLaporte, Caroline and de Poucques, Ludovic and Touzeau, Michel},
article_location = {Paríž},
article_number = {3},
keywords = {pulsed magnetron; sputtering; preionization},
language = {eng},
issn = {0295-5075},
journal = {Europhysics Letters},
title = {Reduction of transient regime in fast preionized high power pulsed magnetron discharge},
volume = {72},
year = {2005}
}
TY - JOUR
ID - 599364
AU - Vašina, Petr - Meško, Marcel - Ganciu, Mihai - Bretagne, Jean - Boisse-Laporte, Caroline - de Poucques, Ludovic - Touzeau, Michel
PY - 2005
TI - Reduction of transient regime in fast preionized high power pulsed magnetron discharge
JF - Europhysics Letters
VL - 72
IS - 3
SP - 390-395
EP - 390-395
PB - European Physical Society
SN - 02955075
KW - pulsed magnetron
KW - sputtering
KW - preionization
N2 - A high-power pulsed-magnetron discharge (several kW/cm2)is described. It operates at pulse duration of the order of few ľs, signicantly shorter than in usual similar devices. The breakdown delay was reduced by using a low-current DC preionization. The study was performed for Cu target in Ar and He bufer gases by optical emission spectroscopy and electrical measurements. Saturation magnetron current is reached in a few ľs which permits to shorten the pulse duration avoiding arc formation. Unusual high current density up to 10A/cm2 induces very fast transition toward the stable self-sputtering regime. High plasma density favours high ion ux to the substrate. Preliminary result on Cu deposit in trenches is reported.
ER -
VAŠINA, Petr, Marcel MEŠKO, Mihai GANCIU, Jean BRETAGNE, Caroline BOISSE-LAPORTE, Ludovic DE POUCQUES and Michel TOUZEAU. Reduction of transient regime in fast preionized high power pulsed magnetron discharge. \textit{Europhysics Letters}. Paríž: European Physical Society, 2005, vol.~72, No~3, p.~390-395, 5 pp. ISSN~0295-5075.
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