| JAŠEK, Ondřej, Marek ELIÁŠ, Martin BUBLAN, Vít KUDRLE, Lenka ZAJÍČKOVÁ, Jiřina MATĚJKOVÁ, Antonín REK, Jiří BURŠÍK and Magdaléna KADLĚČÍKOVÁ. Plasma Enchanced CVD of Carbon Nanotubes in Atmosferic Pressure Microwave Torch. In Proceedings of 15th Symposion on Application of Plasma Processes. 1st ed. Bratislava: Comenius University Press, 2005, p. 187-188. ISBN 80-223-2018-8. |
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@inproceedings{602425,
author = {Jašek, Ondřej and Eliáš, Marek and Bublan, Martin and Kudrle, Vít and Zajíčková, Lenka and Matějková, Jiřina and Rek, Antonín and Buršík, Jiří and Kadlěčíková, Magdaléna},
address = {Bratislava},
booktitle = {Proceedings of 15th Symposion on Application of Plasma Processes},
edition = {1},
keywords = {carbon nanotubes; microwave discharge; scanning electron microscopy},
language = {eng},
location = {Bratislava},
isbn = {80-223-2018-8},
pages = {187-188},
publisher = {Comenius University Press},
title = {Plasma Enchanced CVD of Carbon Nanotubes in Atmosferic Pressure Microwave Torch},
year = {2005}
}
TY - JOUR
ID - 602425
AU - Jašek, Ondřej - Eliáš, Marek - Bublan, Martin - Kudrle, Vít - Zajíčková, Lenka - Matějková, Jiřina - Rek, Antonín - Buršík, Jiří - Kadlěčíková, Magdaléna
PY - 2005
TI - Plasma Enchanced CVD of Carbon Nanotubes in Atmosferic Pressure Microwave Torch
PB - Comenius University Press
CY - Bratislava
SN - 8022320188
KW - carbon nanotubes
KW - microwave discharge
KW - scanning electron microscopy
N2 - In present paper we describe a synthesis of carbon nanotubes in microwave plasma torch at atmospheric pressure from the mixture of methane, hydrogen and argon on Si/SiO2/Fe substrate. Using this relatively novel method and under optimized conditions pure, well aligned and long nanotubes were grown with high deposition rate. The layers were analyzed by scanning electron microscopy and discharge plasma was analyzed by optical emission spectroscopy.
ER -
JAŠEK, Ondřej, Marek ELIÁŠ, Martin BUBLAN, Vít KUDRLE, Lenka ZAJÍČKOVÁ, Jiřina MATĚJKOVÁ, Antonín REK, Jiří BURŠÍK and Magdaléna KADLĚČÍKOVÁ. Plasma Enchanced CVD of Carbon Nanotubes in Atmosferic Pressure Microwave Torch. In \textit{Proceedings of 15th Symposion on Application of Plasma Processes}. 1st ed. Bratislava: Comenius University Press, 2005, p.~187-188. ISBN~80-223-2018-8.
|
