MEDUŇA, Mojmír, Jiří NOVÁK, Claudiu FALUB, Gang CHEN, Günther BAUER, Soichiro TSUJINO, Detlev GRÜTZMACHER, Elisabeth MÜLLER, Yves CAMPIDELLI, Olivier KERMARREC, Daniel BENSAHEL and Norbert SCHELL. High temperature investigations of Si/SiGe based cascade structures using x-ray scattering methods. J. Phys. D: Appl. Phys. Bristol, UK: IOP Publishing, Ltd., 2005, vol. 38, 10A, p. A121-A125, 5 pp. ISSN 0022-3727. |
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@article{617865, author = {Meduňa, Mojmír and Novák, Jiří and Falub, Claudiu and Chen, Gang and Bauer, Günther and Tsujino, Soichiro and Grützmacher, Detlev and Müller, Elisabeth and Campidelli, Yves and Kermarrec, Olivier and Bensahel, Daniel and Schell, Norbert}, article_location = {Bristol, UK}, article_number = {10A}, keywords = {X-ray reflectivity; SiGe; Annealing; Diffusion}, language = {eng}, issn = {0022-3727}, journal = {J. Phys. D: Appl. Phys.}, title = {High temperature investigations of Si/SiGe based cascade structures using x-ray scattering methods}, volume = {38}, year = {2005} }
TY - JOUR ID - 617865 AU - Meduňa, Mojmír - Novák, Jiří - Falub, Claudiu - Chen, Gang - Bauer, Günther - Tsujino, Soichiro - Grützmacher, Detlev - Müller, Elisabeth - Campidelli, Yves - Kermarrec, Olivier - Bensahel, Daniel - Schell, Norbert PY - 2005 TI - High temperature investigations of Si/SiGe based cascade structures using x-ray scattering methods JF - J. Phys. D: Appl. Phys. VL - 38 IS - 10A SP - A121-A125 EP - A121-A125 PB - IOP Publishing, Ltd. SN - 00223727 KW - X-ray reflectivity KW - SiGe KW - Annealing KW - Diffusion N2 - Temperature stability of SiGe/Si (80% Ge) structures was studied using x-ray reflectivity during in-situ annealing around temperature 790C. ER -
MEDUŇA, Mojmír, Jiří NOVÁK, Claudiu FALUB, Gang CHEN, Günther BAUER, Soichiro TSUJINO, Detlev GRÜTZMACHER, Elisabeth MÜLLER, Yves CAMPIDELLI, Olivier KERMARREC, Daniel BENSAHEL and Norbert SCHELL. High temperature investigations of Si/SiGe based cascade structures using x-ray scattering methods. \textit{J. Phys. D: Appl. Phys.}. Bristol, UK: IOP Publishing, Ltd., 2005, vol.~38, 10A, p.~A121-A125, 5 pp. ISSN~0022-3727.
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