MEDUŇA, Mojmír, Jiří NOVÁK, Claudiu FALUB, Gang CHEN, Günther BAUER, Soichiro TSUJINO, Detlev GRÜTZMACHER, Elisabeth MÜLLER, Yves CAMPIDELLI, Olivier KERMARREC, Daniel BENSAHEL and Norbert SCHELL. High temperature investigations of Si/SiGe based cascade structures using x-ray scattering methods. J. Phys. D: Appl. Phys. Bristol, UK: IOP Publishing, Ltd., 2005, vol. 38, 10A, p. A121-A125, 5 pp. ISSN 0022-3727.
Other formats:   BibTeX LaTeX RIS
Basic information
Original name High temperature investigations of Si/SiGe based cascade structures using x-ray scattering methods
Name in Czech Vysokoteplotní studia kaskádových struktur na bázi Si/SiGe za použití metod rtg rozptylu
Authors MEDUŇA, Mojmír (203 Czech Republic, guarantor), Jiří NOVÁK (203 Czech Republic), Claudiu FALUB (642 Romania), Gang CHEN (156 China), Günther BAUER (40 Austria), Soichiro TSUJINO (392 Japan), Detlev GRÜTZMACHER (276 Germany), Elisabeth MÜLLER (756 Switzerland), Yves CAMPIDELLI (250 France), Olivier KERMARREC (250 France), Daniel BENSAHEL (250 France) and Norbert SCHELL (276 Germany).
Edition J. Phys. D: Appl. Phys. Bristol, UK, IOP Publishing, Ltd. 2005, 0022-3727.
Other information
Original language English
Type of outcome Article in a journal
Field of Study 10302 Condensed matter physics
Country of publisher United Kingdom of Great Britain and Northern Ireland
Confidentiality degree is not subject to a state or trade secret
Impact factor Impact factor: 1.957
RIV identification code RIV/00216224:14310/05:00014587
Organization unit Faculty of Science
UT WoS 000230243500024
Keywords in English X-ray reflectivity; SiGe; Annealing; Diffusion
Tags annealing, Diffusion, SiGe, x-ray reflectivity
Tags International impact, Reviewed
Changed by Changed by: Mgr. Mojmír Meduňa, Ph.D., učo 7898. Changed: 14/2/2007 09:39.
Abstract
Temperature stability of SiGe/Si (80% Ge) structures was studied using x-ray reflectivity during in-situ annealing around temperature 790C.
Abstract (in Czech)
Teplotní stabilita SiGe/Si struktur byla studována pomocí rtg reflektivity během žíhání in-situ v okolí teplot 790C.
Links
MSM 143100002, plan (intention)Name: Fyzikální vlastnosti nových materiálů a vrstevnatých struktur
Investor: Ministry of Education, Youth and Sports of the CR, Physical properties of new materials and layered structures
MSM0021622410, plan (intention)Name: Fyzikální a chemické vlastnosti pokročilých materiálů a struktur
Investor: Ministry of Education, Youth and Sports of the CR, Physical and chemical properties of advanced materials and structures
PrintDisplayed: 2/10/2024 03:28