J 2005

High temperature investigations of Si/SiGe based cascade structures using x-ray scattering methods

MEDUŇA, Mojmír, Jiří NOVÁK, Claudiu FALUB, Gang CHEN, Günther BAUER et. al.

Basic information

Original name

High temperature investigations of Si/SiGe based cascade structures using x-ray scattering methods

Name in Czech

Vysokoteplotní studia kaskádových struktur na bázi Si/SiGe za použití metod rtg rozptylu

Authors

MEDUŇA, Mojmír (203 Czech Republic, guarantor), Jiří NOVÁK (203 Czech Republic), Claudiu FALUB (642 Romania), Gang CHEN (156 China), Günther BAUER (40 Austria), Soichiro TSUJINO (392 Japan), Detlev GRÜTZMACHER (276 Germany), Elisabeth MÜLLER (756 Switzerland), Yves CAMPIDELLI (250 France), Olivier KERMARREC (250 France), Daniel BENSAHEL (250 France) and Norbert SCHELL (276 Germany)

Edition

J. Phys. D: Appl. Phys. Bristol, UK, IOP Publishing, Ltd. 2005, 0022-3727

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10302 Condensed matter physics

Country of publisher

United Kingdom of Great Britain and Northern Ireland

Confidentiality degree

není předmětem státního či obchodního tajemství

Impact factor

Impact factor: 1.957

RIV identification code

RIV/00216224:14310/05:00014587

Organization unit

Faculty of Science

UT WoS

000230243500024

Keywords in English

X-ray reflectivity; SiGe; Annealing; Diffusion

Tags

annealing, Diffusion, SiGe, x-ray reflectivity

Tags

International impact, Reviewed
Změněno: 14/2/2007 09:39, Mgr. Mojmír Meduňa, Ph.D.

Abstract

ORIG CZ

V originále

Temperature stability of SiGe/Si (80% Ge) structures was studied using x-ray reflectivity during in-situ annealing around temperature 790C.

In Czech

Teplotní stabilita SiGe/Si struktur byla studována pomocí rtg reflektivity během žíhání in-situ v okolí teplot 790C.

Links

MSM 143100002, plan (intention)
Name: Fyzikální vlastnosti nových materiálů a vrstevnatých struktur
Investor: Ministry of Education, Youth and Sports of the CR, Physical properties of new materials and layered structures
MSM0021622410, plan (intention)
Name: Fyzikální a chemické vlastnosti pokročilých materiálů a struktur
Investor: Ministry of Education, Youth and Sports of the CR, Physical and chemical properties of advanced materials and structures
Displayed: 3/11/2024 14:30